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Precision Motion Systems

Specialty Motors

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Automation / Intelligent Manufacturing

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YiNGUAN specializes in high-precision motion systems that supply key parts to the semiconductor and LCD industries. The product portfolio includes precision motion systems, advanced piezoelectric actuators, specialty motors, high-precision motion drivers and controllers.

PRODUCTS PRODUCT

Piezoelectric Material

Piezoelectric Material

Suitable for precision motion.
Wide range of application fields.
Vacuum compatible, not affected by electromagnetic interference.
Possesses a certain level of mechanical strength and high compressive resistance.

Piezo Chip Actuator

Piezo Chip Actuator

AC lifetime: 10⁹ cycles.
Operating voltage: -20 to +150V.
Microsecond-level response.
Vacuum compatible up to 10⁻⁶ Pa.
Sub-nanometer resolution.
Curie temperature of 230°C.

Piezo Chip Actuator - Round

Piezo Chip Actuator - Round

AC lifetime: 10⁹ cycles
Compact structure
Microsecond-level response
Vacuum compatible up to 10⁻⁶ Pa
Sub-nanometer resolution
Curie temperature: 230°C
Operating voltage: -20 to +150V

Rectangular Piezoelectric Actuators with Through Holes

Rectangular Piezoelectric Actuators with Through Holes

AC lifetime: 10⁹ cycles
Compact structure
Microsecond-level response
Vacuum compatible up to 10^-6Pa
Sub-nanometer resolution
Curie temperature: 230°C
Operating voltage: -20 to +150V

A5 series Preloaded Piezo Actuator

A5 series Preloaded Piezo Actuator

1000N thrust
Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa

B5 series Preloaded Piezo Actuator

B5 series Preloaded Piezo Actuator

Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa
Threaded interface, optional flat and spherical end caps

B7 series Preloaded Piezo Actuator

B7 series Preloaded Piezo Actuator

1000N thrust
Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa
Threaded interface, optional flat and spherical end caps

C5 series Preloaded Piezo Actuator

C5 series Preloaded Piezo Actuator

1000N thrust
Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa
Integrated spherical end cap

C7 series Preloaded Piezo Actuator

C7 series Preloaded Piezo Actuator

2000N thrust
Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa
Integrated spherical end cap

Piezoelectric Stepping Motor

Piezoelectric Stepping Motor

High drive force
Nano precision
High static holding force
Large travel range
High resolution
Suitable for high vacuum environments

Piezoelectric Inertia Motor

Piezoelectric Inertia Motor

High-speed displacement
High resolution
Compact size
Suitable for high vacuum environments

Piezoelectric Stepping Motor Stage - ZTT

Piezoelectric Stepping Motor Stage - ZTT

Using piezoelectric stepping motor as motion actuators, high drive force, high holding force
Multi-axis parallel control
Millimeter-level large travel range
Integrated high-precision encoder, nanometer resolution

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