The stage adopts innovative wedge design with a compact, low-profile. Through the high stiffness guide column and high precision screw structure, the platform has a very high positioning accuracy, repeatability and high load capacity.
*Interface dimensions from MZH400 in the middle of vertical stroke
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MZH400-25 |
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Travel range |
25 mm |
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Max. velocity |
20 mm/s |
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Max. acceleration |
50 mm/s² |
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Accuracy |
±1 μm |
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Bidirectional repeatability |
±0.5 μm |
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Straightness |
±3 μm |
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Pitch |
100 µrad (21 arcsec) |
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Roll |
100 µrad(21 arcsec) |
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Yaw |
100 µrad(21 arcsec) |
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Orthogonality |
100 µrad(21 arcsec) |
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Mechanical properties |
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Moving mass (without payload) |
23 Kg |
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Max. load |
50 Kg |
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Stage mass |
44 Kg |
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Dimensions |
574.4 mm×392.4 mm×202 mm |
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Material |
Aviation aluminum,black anodized |
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
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Table 1 Travel Options |
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-10 |
10mm travel displacement platform with servo motor and limit |
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-20 |
20mm travel displacement platform with servo motor and limit |
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-30 |
30mm travel displacement platform with servo motor and limit |
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Table 2 Encoder Options |
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-S1 |
Incremental analog optical encoder, 1Vpp |
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-S2 |
Incremental digital optical encoder, RS422 |
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-S3 |
Absolute optical encoder, BISS |
