Semiconductor, Flat panel display, Optical fiber alignment
The stage adopts innovative wedge design with a compact, low-profile. Through the high stiffness guide column and high precision screw structure, the platform has a very high positioning accuracy, repeatability and high load capacity.
*Interface dimensions from MZH400 in the middle of vertical stroke
|
Item |
MZH400-25 |
|
|
Travel range |
mm |
25 |
|
Max. velocity |
mm/s |
20 |
|
Max. acceleration |
mm/s² |
50 |
|
Accuracy |
μm |
±1 |
|
Bidirectional repeatability |
μm |
±0.5 |
|
Straightness |
μm |
±3 |
|
Pitch |
|
100µrad(21arcsec) |
|
Roll |
|
100µrad(21arcsec) |
|
Yaw |
|
100µrad(21arcsec) |
|
Orthogonality |
|
100µrad(21arcsec) |
|
Mechanical specifications |
|
|
|
Moving mass (without payload) |
Kg |
23 |
|
Max. load |
Kg |
50 |
|
Stage mass |
Kg |
44 |
|
Dimensions |
mm×mm×mm |
574.4×392.4×202 |
|
Material |
|
Aviation aluminum,black anodized |
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
|
Table 1 Travel Options |
|
|
-10 |
10mm travel displacement platform with servo motor and limit |
|
-20 |
20mm travel displacement platform with servo motor and limit |
|
-30 |
30mm travel displacement platform with servo motor and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
Incremental digital optical linear encoder, RS422 |
|
-S3 |
Absolute optical linear encoder, BISS |
