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Air-Bearing Stage

ARD120 Air-Bearing Rotary Stage

ARD120 Air-Bearing Rotary Stage

Single T-axis
Air-bearing design
Bidirectional repeatability: ±0.5 arcsec
Diameter: 120-220 mm
Hollow aperture: 10-50 mm
Max. load_Axial: 8-66 Kg
Max. load_Radial: 4-36 Kg
Rotation velocity up to 1000 rpm

PART100 Air-Bearing Rotary Stage

PART100 Air-Bearing Rotary Stage

Single T-axis
Air-bearing design
Bidirectional repeatability: ±1 arcsec
Diameter: 100 mm
Hollow aperture: 25 mm
Max. load_Axial: 53 Kg
Max. load_Radial: 17 Kg
Rotation velocity up to 600 rpm@48V

LART150 Air-Bearing Rotary Stage

LART150 Air-Bearing Rotary Stage

Single T-axis
Air-bearing design
Bidirectional repeatability: ±1 arcsec
Diameter: 150 mm
Hollow aperture: 75 mm
Max. load_Axial: 80 Kg
Max. load_Radial: 30 Kg
Rotation velocity up to 800rpm

AXY110 Air-bearing XY stage

AXY110 Air-bearing XY stage

X and Y axes
Travel range: 160mm（upper axis）；180mm（lower axis）
Bidirectional repeatability: ±0.1μm（upper axis）；±0.1μm（lower axis）
Max. load: 4.5 Kg

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