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Air-Bearing Stage

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ARD120 Mechanical-Bearing Rotary Stage
ARD120 Mechanical-Bearing Rotary Stage
  • Single T-axis
  • Air-bearing design
  • Bidirectional repeatability: ±0.5 arcsec
  • Diameter: 120-220 mm
  • Hollow aperture: 10-50 mm
  • Max. load_Axial: 8-66 Kg
  • Max. load_Radial: 4-36 Kg
  • Rotation velocity up to 1000 rpm
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PART100 Air-Bearing Rotary Stage
PART100 Air-Bearing Rotary Stage
  • Single T-axis
  • Air-bearing design
  • Bidirectional repeatability: ±1 arcsec
  • Diameter: 100 mm
  • Hollow aperture: 25 mm
  • Max. load_Axial: 53 Kg
  • Max. load_Radial: 17 Kg
  • Rotation velocity up to 600 rpm@48V
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LART150 Air-Bearing Rotary Stage
LART150 Air-Bearing Rotary Stage
  • Single T-axis
  • Air-bearing design
  • Bidirectional repeatability: ±1 arcsec
  • Diameter: 150 mm
  • Hollow aperture: 75 mm
  • Max. load_Axial: 80 Kg
  • Max. load_Radial: 30 Kg
  • Rotation velocity up to 800rpm
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AXY110 Air-bearing XY stage
AXY110 Air-bearing XY stage
  • X and Y axes
  • Travel range: 160mm（upper axis）；180mm（lower axis）
  • Bidirectional repeatability: ±0.1μm（upper axis）；±0.1μm（lower axis）
  • Max. load: 4.5 Kg
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