Semiconductor equipment and laser field
The stage provides ultra-smooth motion, arc-second accuracy and repeatability; the lightweight design makes the product lighter for easier integration.
*Interface dimensions from PART100
| Unit |
PART100 |
|
|
Tabletop diameter |
mm |
100 |
|
Height |
mm |
95 |
|
Hollow aperture |
mm |
25 |
|
Max. velocity |
rpm |
600rpm@48V |
|
Peak torque |
N·m |
3.9 |
|
Continuous torque |
N·m |
3.2 |
|
Accuracy |
arcsec |
±1.5 |
|
Bidirectional repeatability |
arcsec |
±1 |
|
Max. load_Axial |
Kg |
53 |
|
Max. load_Radial |
Kg |
17 |
|
Axial error motion (Synchronous) |
nm |
<100 |
|
Radial error motion(Synchronous) |
nm |
<200 |
|
Tilt error motion (Synchronous) |
|
<2.5µrad (0.5arcsec) |
|
Operating pressure |
Mpa |
0.5 |
|
Air consumption |
L/min |
<25 |
|
Total mass |
Kg |
4 |
＊Rotation velocity 60rpm based on the standard GBT+17421.7-2016(ISO230-7-2006)and GB/T17421.22000 as well as the temperature (22°±0.5℃).
