Shanghai YiNGUAN Semiconductor Technology Co., LTD

CN
产品中心详情页
Air-Bearing Stage
HOME > PRODUCTS > Precision Motion Systems > Air-Bearing Stage
PART100 Air-Bearing Rotary Stage
Features

  • High-load and precision air-bearing design 
  • High repeatability and positioning accuracy
  • High level of machining technology
  • Customized requirements accepted

Download
Applications
  • Semiconductor equipment and laser field
Description

The stage provides ultra-smooth motion, arc-second accuracy and repeatability; the lightweight design makes the product lighter for easier integration.

Performance Chart

 *Interface dimensions from PART100

Technical Specifications
<<<Swipe left to see more parameters
 

PART100

Tabletop diameter

100 mm

Height

95 mm

Hollow aperture

25 mm

Max. velocity

600rpm@48V

Peak torque

3.9 N·m

Continuous torque

3.2 N·m

Accuracy

±1.5 arcsec

Bidirectional repeatability

±1 arcsec

Max. load_Axial

53 Kg

Max. load_Radial

17 Kg

Axial error motion (Synchronous)

<100 nm

Radial error motion(Synchronous)

<200 nm

Tilt error motion (Synchronous)

<2.5µrad (0.5arcsec)

Operating pressure

0.5 Mpa

Air consumption

<25 L/min

Total mass

4 Kg

*Rotation velocity 60rpm based on the standard GBT+17421.7-2016(ISO230-7-2006)and GB/T17421.22000 as well as the temperature (22±0.5℃).

Contact
© 2019-2026    Shanghai YiNGUAN Semiconductor Technology Co., LTD   www.ygbdt.com    All rights reserved ICP备案:沪ICP备19035819号