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Single-Axis Stage
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Miniature Linear Stage
Miniature Linear Stage
Miniature Linear Stage
Features

  • High dynamic response, non-contact linear motor drive.
  • High-precision optical linear encoder feedback.
  • High-stiffness anti-creep cross-roller guideway design.
  • Excellent positioning accuracy and dynamic performance.

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Applications
  • Laser cutting
  • Flat panel display 
  • Semiconductor
  • Automation
Description

The stage adopts ultra-thin profile, can meet single-axis and multi-axis use cases and realize the horizontal high precision, high stiffness linear motion.

Interface Definition

Technical Specifications
<<<Swipe left to see more parameters

Item

MTS80-25

MTS80-50

Travel range

±25mm

±50mm

Max. velocity

0.5m/s

0.5m/s

Max. acceleration

0.5g

0.5g

Bidirectional repeatability

±0.3µm

±0.3µm

Accuracy_calibration value

±0.5µm

±0.5µm

Straightness

±1µm

±1µm

Flatness

±1µm

±1µm

Pitch

75µrad

75µrad

Yaw

50µrad

50µrad

Max. load

4kg

6kg

Peak force

23.8N

35.7N

Continuous force

6.0N

8.9N

Moving mass

0.71kg

1.08kg

Total mass

1.49kg

2.35kg

Dimensions

140mmX95mmX33mm

210mmX95mmX33mm

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