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Single-Axis Stage
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MTS80 Miniature linear stage
Features

  • Non-contact direct-drive linear motor drive for high dynamic response.
  • Optical encoder for high precision.
  • High stiffness anti-creep cross roller guide.
  • Excellent positioning accuracy and dynamic performance.

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Applications
  • Laser cutting
  • Flat panel display 
  • Semiconductor
  • Automation
Description

Miniature linear stage with ultra-thin profile dimensions for single-axis and multi-axis use cases, realizing high-precision and high-stiffness horizontal linear motion.

Interface Definition

Technical Specifications
<<<Swipe left to see more parameters

 

MTS80-25

MTS80-50

Travel range

±25mm

±50mm

Max. velocity

0.5m/s

0.5m/s

Max. acceleration

0.5g

0.5g

Bidirectional repeatability

±0.3µm

±0.3µm

Accuracy_calibration value

±0.5µm

±0.5µm

Straightness

±1µm

±1µm

Flatness

±1µm

±1µm

Pitch

75µrad

75µrad

Yaw

50µrad

50µrad

Max. load

4Kg

6Kg

Peak force

23.8N

35.7N

Continuous force

6.0N

8.9N

Moving mass

0.71Kg

1.08Kg

Total mass

1.49Kg

2.35Kg

Dimensions

140mmX95mmX33mm

210mmX95mmX33mm

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