The stage adopts ultra-thin profile, can meet single-axis and multi-axis use cases and realize the horizontal high precision, high stiffness linear motion.
|
Item |
MTS80-25 |
MTS80-50 |
|
Travel range |
±25mm |
±50mm |
|
Max. velocity |
0.5m/s |
0.5m/s |
|
Max. acceleration |
0.5g |
0.5g |
|
Bidirectional repeatability |
±0.3µm |
±0.3µm |
|
Accuracy_calibration value |
±0.5µm |
±0.5µm |
|
Straightness |
±1µm |
±1µm |
|
Flatness |
±1µm |
±1µm |
|
Pitch |
75µrad |
75µrad |
|
Yaw |
50µrad |
50µrad |
|
Max. load |
4kg |
6kg |
|
Peak force |
23.8N |
35.7N |
|
Continuous force |
6.0N |
8.9N |
|
Moving mass |
0.71kg |
1.08kg |
|
Total mass |
1.49kg |
2.35kg |
|
Dimensions |
140mmX95mmX33mm |
210mmX95mmX33mm |
