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Single-Axis Stage
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MTS80 Miniature linear stage
Features

  • Non-contact direct-drive linear motor drive for high dynamic response.
  • Optical encoder for high precision.
  • High stiffness anti-creep cross roller guide.
  • Excellent positioning accuracy and dynamic performance.

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Applications
  • Laser cutting
  • Flat panel display 
  • Semiconductor
  • Automation
Description

Miniature linear stage with ultra-thin profile dimensions for single-axis and multi-axis use cases, realizing high-precision and high-stiffness horizontal linear motion.

Performance Chart

Technical Specifications
<<<Swipe left to see more parameters

 

MTS80-25

MTS80-50

Travel range

±25 mm

±50 mm

Max. velocity

0.5 m/s

0.5 m/s

Max. acceleration

0.5 g

0.5 g

Bidirectional repeatability

±0.3 µm

±0.3 µm

Accuracy_calibration value

±0.5 µm

±0.5 µm

Straightness

±1 µm

±1 µm

Flatness

±1 µm

±1 µm

Pitch

75 µrad

75 µrad

Yaw

50 µrad

50 µrad

Max. load

4 Kg

6 Kg

Peak force

23.8 N

35.7 N

Continuous force

6.0 N

8.9 N

Moving mass

0.71 Kg

1.08 Kg

Total mass

1.49 Kg

2.35 Kg

Dimensions

140 mm× 95 mm × 33 mm

210 mm × 95 mm × 33 mm

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