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Piezo Products

Piezoelectric Material

Piezoelectric Material

Suitable for precision motion.
Wide range of application fields.
Vacuum compatible, not affected by electromagnetic interference.
Possesses a certain level of mechanical strength and high compressive resistance.

Piezo Chip Actuator

Piezo Chip Actuator

AC lifetime: 10⁹ cycles.
Operating voltage: -20 to +150V.
Microsecond-level response.
Vacuum compatible up to 10⁻⁶ Pa.
Sub-nanometer resolution.
Curie temperature of 230°C.

Piezo Chip Actuator - Round

Piezo Chip Actuator - Round

AC lifetime: 10⁹ cycles
Compact structure
Microsecond-level response
Vacuum compatible up to 10⁻⁶ Pa
Sub-nanometer resolution
Curie temperature: 230°C
Operating voltage: -20 to +150V

Piezo Chip Actuator - Ring

Piezo Chip Actuator - Ring

AC lifetime: 10⁹ cycles
Compact structure
Microsecond-level response
Vacuum compatible up to 10⁻⁶ Pa
Sub-nanometer resolution
Curie temperature: 230°C
Operating voltage: -20 to +150V

Rectangular Piezoelectric Actuators with Through Holes

Rectangular Piezoelectric Actuators with Through Holes

AC lifetime: 10⁹ cycles
Compact structure
Microsecond-level response
Vacuum compatible up to 10^-6Pa
Sub-nanometer resolution
Curie temperature: 230°C

Piezo Stack Actuator

Piezo Stack Actuator

Operating voltage: -20 to +150V
2 to 100μm travel range
Vacuum compatible up to 10⁻⁶ Pa
Sub-nanometer resolution
Curie temperature: 230°C

Piezo Bender Actuator

Piezo Bender Actuator

AC lifetime: 10⁹ cycles
Microsecond-level response
Vacuum compatible up to 10⁻⁶ Pa
Operating voltage: -20 to +150V
Curie temperature: 230°C

Round Piezoelectric Bimorph Bender

Round Piezoelectric Bimorph Bender

AC lifetime: 10⁹ cycles
Microsecond-level response
Vacuum compatible up to 10^{-6 Pa}
Operating voltage: -20 to +150V
Curie temperature: 230°C

A5 series Preloaded Piezo Actuator

A5 series Preloaded Piezo Actuator

1000N thrust
Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa

B5 series Preloaded Piezo Actuator

B5 series Preloaded Piezo Actuator

Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa
Threaded interface, optional flat and spherical end caps

B7 series Preloaded Piezo Actuator

B7 series Preloaded Piezo Actuator

2000N thrust
Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa
Threaded interface, optional flat and spherical end caps

C5 series Preloaded Piezo Actuator

C5 series Preloaded Piezo Actuator

1000N thrust
Piezoelectric ceramics with lifetime of one billion cycles
Sub-nanometer resolution
Simple structure, compact size
Vacuum compatible up to 10⁻⁵ Pa
Integrated spherical end cap

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