The stage adopts XY unibody, orthogonality design with an ultra-thin profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from PL90
|
|
PL90-100 |
PL90-200 |
PL90-300 |
|
Travel range |
±50 mm |
±100 mm |
±150 mm |
|
Max. velocity |
0.3 m/s |
0.5 m/s |
0.5 m/s |
|
Max. acceleration |
0.4 g |
0.4 g |
0.4 g |
|
Accuracy |
±1.5 μm |
±2 μm |
±2 μm |
|
Bidirectional repeatability |
|
±0.5 μm |
|
|
Straightness |
±2 μm |
±3 μm |
±4 μm |
|
Flatness |
±2 μm |
±3 μm |
±4 μm |
|
Pitch |
15 arcsec |
20 arcsec |
25 arcsec |
|
Roll |
15 arcsec |
20 arcsec |
25 arcsec |
|
Yaw |
15 arcsec |
20 arcsec |
25 arcsec |
|
Orthogonality |
20 arcsec |
20 arcsec |
20 arcsec |
|
Moving mass (without payload)_Upper axis |
6 Kg |
8.6 Kg |
11.5 Kg |
|
Moving mass (without payload)_Lower axis |
15 Kg |
18 Kg |
20 Kg |
|
Max. load |
10 Kg |
10 Kg |
10 Kg |
|
Stage mass |
22 Kg |
26 Kg |
31 Kg |
|
Dimensions |
380 mm×380 mm×90 mm |
380 mm×380 mm×90 mm |
430 mm×430 mm×90 mm |
|
Material |
Aviation aluminum, black anodized |
Aviation aluminum, black anodized |
Aviation aluminum, black anodized |
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
|
Table 1 Travel Options |
|
|
-100 |
100mm travel stroke platform with linear motors and limit |
|
-200 |
200mm travel stroke platform with linear motors and limit |
|
-300 |
300mm travel stroke platform with linear motors and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
Incremental analog optical encoder, 1Vpp |
|
-S2 |
Incremental digital optical encoder, RS422 |
|
-S3 |
Absolute optical encoder, BISS |
