Semiconductor, Flat panel display, Optical fiber alignment, Biomedicine
The stage adopts XY unibody, orthogonality design with an ultra-thin profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from PL90
|
Item |
Unit |
PL90-100 |
PL90-200 |
PL90-300 |
|
Travel range |
mm |
±50 |
±100 |
±150 |
|
Max. velocity |
mm/s |
500 |
750 |
1000 |
|
Max. acceleration |
g |
1 |
1 |
1 |
|
Accuracy |
μm |
±1.5 |
±2 |
±2.5 |
|
Bidirectional repeatability |
μm |
±0.5 |
±0.5 |
±0.5 |
|
Straightness |
μm |
±1 |
±1.5 |
±2 |
|
Flatness |
μm |
±1 |
±1.5 |
±2 |
|
Pitch |
arcsec |
12 |
15 |
18 |
|
Roll |
arcsec |
12 |
15 |
18 |
|
Yaw |
arcsec |
6 |
8 |
10 |
|
Orthogonality |
arcsec |
20 |
20 |
20 |
|
Mechanical specifications |
||||
|
Moving mass (without payload) _Upper axis |
Kg |
2.9 |
8.6 |
16.3 |
|
Moving mass (without Payload) _Lower axis |
Kg |
8.4 |
16.7 |
45 |
|
Max. load |
Kg |
15 |
26 |
30 |
|
Stage mass |
Kg |
11 |
25 |
54 |
|
Dimensions |
mm×mm×mm |
250×230×60 |
360×340×90 |
410×410×90 |
|
Material |
|
Aviation aluminum, black anodized |
||
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
|
Table 1 Travel Options |
|
|
-100 |
100mm travel stroke platform with linear motors and limit |
|
-200 |
200mm travel stroke platform with linear motors and limit |
|
-300 |
300mm travel stroke platform with linear motors and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
Incremental digital optical linear encoder, RS422 |
|
-S3 |
Absolute optical linear encoder, BISS |
