The stage adopts XY unibody, orthogonality design with an ultra-thin profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from PL90
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|
PL90-100 |
PL90-200 |
PL90-300 |
|
Travel range |
±50 mm |
±100 mm |
±150 mm |
|
Max. velocity |
0.3 m/s |
0.5 m/s |
0.5 m/s |
|
Max. acceleration |
0.4 g |
0.4 g |
0.4 g |
|
Accuracy |
±1.5 μm |
±2 μm |
±2 μm |
|
Bidirectional repeatability |
±0.5 μm |
||
|
Straightness |
±2 μm |
±3 μm |
±4 μm |
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Flatness |
±2 μm |
±3 μm |
±4 μm |
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Pitch |
±15 arcsec |
±20 arcsec |
±25 arcsec |
|
Roll |
±15 arcsec |
±20 arcsec |
±25 arcsec |
|
Yaw |
±15 arcsec |
±20 arcsec |
±25 arcsec |
|
Orthogonality |
20 arcsec |
20 arcsec |
20 arcsec |
| Mechanical properties | |||
|
Moving mass (without payload)_Upper axis |
6 Kg |
8.6 Kg |
11.5 Kg |
|
Moving mass (without payload)_Lower axis |
15 Kg |
18 Kg |
20 Kg |
|
Max. load |
10 Kg |
10 Kg |
10 Kg |
|
Stage mass |
22 Kg |
26 Kg |
31 Kg |
|
Dimensions |
380 mm×380 mm×90 mm |
380 mm×380 mm×90 mm |
430 mm×430 mm×90 mm |
|
Material |
Aviation aluminum, black anodized |
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The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
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Table 1 Travel Options |
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|
-100 |
100mm travel stroke platform with linear motors and limit |
|
-200 |
200mm travel stroke platform with linear motors and limit |
|
-300 |
300mm travel stroke platform with linear motors and limit |
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Table 2 Encoder Options |
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|
-S1 |
Incremental analog optical encoder, 1Vpp |
|
-S2 |
Incremental digital optical encoder, RS422 |
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-S3 |
Absolute optical encoder, BISS |
