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XY Stage
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PL90 Flat integrated XY stage
PL90 Flat integrated XY stage
PL90 Flat integrated XY stage
Features

  • Non - contact direct - drive linear motor drive for high dynamic response
  • Optical linear encoder for high precision
  • High stiffness anti - creep cross roller guide
  • Excellent positioning accuracy and dynamic performance

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Applications
  • Semiconductor
  • Flat panel display
  • Optical fiber alignment
  • Biomedicine
Description

The stage adopts XY unibody, orthogonality design with an ultra-thin profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.

Interface Definition

 *Interface dimensions from PL90

Technical Specifications
<<<Swipe left to see more parameters

 

PL90-100

PL90-200

PL90-300

Travel range

±50 mm

±100 mm

±150 mm

Max. velocity

0.3 m/s

0.5 m/s

0.5 m/s

Max. acceleration

0.4 g

0.4 g

0.4 g

Accuracy

±1.5 μm

±2 μm

±2 μm

Bidirectional repeatability

 

±0.5 μm

 

Straightness

±2 μm

±3 μm

±4 μm

Flatness

±2 μm

±3 μm

±4 μm

Pitch

15 arcsec

20 arcsec

25 arcsec

Roll

15 arcsec

20 arcsec

25 arcsec

Yaw

15 arcsec

20 arcsec

25 arcsec

Orthogonality

20 arcsec

20 arcsec

20 arcsec

Moving mass (without payload)_Upper axis

6 Kg

8.6 Kg

11.5 Kg

Moving mass (without payload)_Lower axis

15 Kg

18 Kg

20 Kg

Max. load

10 Kg

10 Kg

10 Kg

Stage mass

22 Kg

26 Kg

31 Kg

Dimensions

380 mm×380 mm×90 mm

380 mm×380 mm×90 mm

430 mm×430 mm×90 mm

Material

Aviation aluminum, black anodized

Aviation aluminum, black anodized

Aviation aluminum, black anodized

Customization Info

The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.

Table 1 Travel Options

-100

100mm travel stroke platform with linear motors and limit

-200

200mm travel stroke platform with linear motors and limit

-300

300mm travel stroke platform with linear motors and limit

Table 2 Encoder Options

-S1

Incremental analog optical linear encoder, 1Vpp

-S2

Incremental digital optical linear encoder, RS422

-S3

Absolute optical linear encoder, BISS

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