• High thermal conductivity, low coefficient of expansion 
• Ultra-flat capabilities
• High stiffness, better wear resistance
• Lightweight design
• High purity, no metal ion pollution
• Customized requirements accepted

• Coulomb's Law or Gradient Force electrostatic chuck  
• Support Bi-polar, multi-polar electrode, interdigitated electrode design etc.
• Suitable for UHV environments up to 10^-5 Pa 
• High clamping force
• Typical global flatness: 2μm PV (D = 300 mm)
• Flexible surface pattern design
• Suitable for non-magnetic environment
• Adsorption objects include wafer, dielectric material such as sapphire, glass and more.

• Provide two phase voltages of equal magnitude and opposite phase
• Provide the penetration voltage for wafer use
• Provide capacitance detection, for indicator of  no-wafer, wafer-clamped, and release status
• Provide penetration detection, for indicator of penetration status   
• LCD displayer, with the value of clamping and penetration voltage,resistance and capacitance detection

Main features:

• Bending life exceeds 10 million cycles.
• A greater variety of cable types and flexible combination methods.
• Higher integration with a smaller bending radius.
• High cleanliness movement with no particles.
• No minimum order quantity restrictions.

Main features of dust-free sheath drag chain

• Highly durable outer layer with a resistance of millions of reciprocating cycles.
• Cleanliness level of ISO Class 100, effectively protecting cables and reducing cable powder。
• Wide range of application.
• Customizable for different POD widths, meeting customer customization requirements.

• Feedthru can be CF, KF, ISO standard flanges or customized.
• The optical fiber and feedthrough are sealed by adhesive, and the optical fiber has no breakpoint to ensure the best optical performance.
• Applicable to single-mode, multi-mode, polarization-maintaining fiber and other optical fibers.
• Components can be single-pass or multi-pass.
• The material in the cavity is suitable for vacuum conditions, and the fiber sheath material can be stainless steel 304 and PTFE.
• Suitable for UHV environments up to 10^-5Pa