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Precision Motion Systems

VLS200 XY Stage

VLS200 XY Stage

Suitable for ultra-high vacuum environment up to 10^-5Pa
Vacuum linear motor drive for low outgassing rate, low heat generation
Unique linear motor magnetic shielding design
Optional non-magnetic materials, with overall magnetic leakage up to nT level.
Excellent velocity and position stability

ARD120 Mechanical-Bearing Rotary Stage

ARD120 Mechanical-Bearing Rotary Stage

Single T-axis
Air-bearing design
Bidirectional repeatability: ±0.5 arcsec
Diameter: 120-220 mm
Hollow aperture: 10-50 mm
Max. load_Axial: 8-66 Kg
Max. load_Radial: 4-36 Kg
Rotation velocity up to 1000 rpm

PART100 Air-Bearing Rotary Stage

PART100 Air-Bearing Rotary Stage

Single T-axis
Air-bearing design
Bidirectional repeatability: ±1 arcsec
Diameter: 100 mm
Hollow aperture: 25 mm
Max. load_Axial: 53 Kg
Max. load_Radial: 17 Kg
Rotation velocity up to 600 rpm@48V

LART150 Air-Bearing Rotary Stage

LART150 Air-Bearing Rotary Stage

Single T-axis
Air-bearing design
Bidirectional repeatability: ±1 arcsec
Diameter: 150 mm
Hollow aperture: 75 mm
Max. load_Axial: 80 Kg
Max. load_Radial: 30 Kg
Rotation velocity up to 800rpm

AXY110 Air-bearing XY stage

AXY110 Air-bearing XY stage

X and Y axes
Travel range: 160mm（upper axis）；180mm（lower axis）
Bidirectional repeatability: ±0.1μm（upper axis）；±0.1μm（lower axis）
Max. load: 4.5 Kg

RD180 Mechanical-Bearing Rotary Stage

RD180 Mechanical-Bearing Rotary Stage

Single T-axis
Bidirectional repeatability: ±2 arcsec
Dimensions: 284 mm×284 mm
Max. load_Axial: 7 Kg
Max. load_Radial: 3 Kg
Rotation velocity up to 150 rpm

LTS165 Single-Axis Linear Stage

LTS165 Single-Axis Linear Stage

Single axis
Travel range: 100-600mm
Bidirectional repeatability: ±0.5μm
Max. load: 40Kg

MZM200 Z Stage with Maglev gravity compensator

MZM200 Z Stage with Maglev gravity compensator

Non - contact direct - drive linear motor drive for high dynamic response
Optical linear encoder for high precision
High stiffness, high precision guide
High load, high eccentricity resistance
Unique large - stroke maglev gravity compensation technology
Full closed - loop servo design
Excellent positioning accuracy and dynamic performance

MZH 400Heavy-load Z Stage

MZH 400Heavy-load Z Stage

Single Z-axis
Travel range: 25 mm
Bidirectional repeatability: ±0.5 μm
Max. load: 50 Kg

MTS80 Miniature linear stage

MTS80 Miniature linear stage

Single axis
Travel range: ±25mm-±50mm
Bidirectional repeatability: ±0.3μm
Max. load: 4-6Kg

L2S125 Stacked XY Stage

L2S125 Stacked XY Stage

X and Y axes
Travel range: 365 mm * 365 mm & 410 mm * 475 mm
Bidirectional repeatability: ±0.4 μm
Max. load: 2 Kg & 6 Kg

PL90 Flat integrated XY stage

PL90 Flat integrated XY stage

Non - contact direct - drive linear motor drive for high dynamic response
Optical linear encoder for high precision
High stiffness anti - creep cross roller guide
Excellent positioning accuracy and dynamic performance

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