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Air-Bearing Stage
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ARD120 Air-Bearing Rotary Stage
Features

  • Non-contact torque motor drive for high dynamic response
  • Optical encoder for high precision
  • Enclosed air-bearing design for high stiffness, high precision
  • Axial runout and radial runout with Nano-precision accuracy
  • Low-profile design

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Applications
  • Wafer inspection,
  • High precision metrology
  • X-ray diffraction systems
  • Optical inspection and manufacturing
  • MEMS/nanotechnology equipment manufacturing
Description

The stage provides excellent angle positioning accuracy, velocity stability and lower runout.

Performance Chart

*Interface dimensions from ARD180

Technical Specifications
<<<Swipe left to see more parameters

 

ARD120-00

ARD180-00

ARD220-00

Accuracy

±2 arcsec

Bidirectional repeatability

±0.5 arcsec

Axial runout

<180 nm

<100 nm

Radial runout

<450 nm

<250 nm

Tilt error motion

<1 arcsec

<0.7 arcsec

Continuous torque

0.48 N·m

2.36 N·m

5.99 N·m

Max. velocity

1000 rpm

1000 rpm

1000 rpm

Mechanical properties

 

 

 

Dimensions

120 mm

180 mm

220 mm

Hollow aperture

10 mm

30 mm

50 mm

Max. load_Axial

8 Kg

30 Kg

66 Kg

Max. load_Radial

4 Kg

15 Kg

36 Kg

Operating pressure_Axial

5 bar ±0.5 bar

Operating pressure_Radial

6 bar ±0.5 bar

Total mass

4.5 Kg

6.1 Kg

8.3 Kg

Material

Aviation aluminum,black anodized/hard anodized

Customization Info

The series is configured with options that can be selected based on the user's actual application. Options include dimension, encoder and more.

Table 1 Dimension Options

-120

120, Diameter

-180

180, Diameter

-220

220, Diameter

Table 2 Encoder Options

-S1

Incremental analog optical encoder, 1Vpp

-S2

Incremental digital optical encoder, RS422

-S3

Absolute optical encoder, BISS

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