Wafer inspection, High precision metrology, X-ray diffraction systems, Optical inspection and manufacturing, MEMS/nanotechnology equipment manufacturing
The stage provides excellent angle positioning accuracy, velocity stability and lower runout.
*Interface dimensions from RD120
|
Item |
Unit |
ARD120-00 |
ARD180-00 |
ARD220-00 |
|
Accuracy |
arcsec |
±2 |
±2 |
±2 |
|
Bidirectional repeatability |
arcsec |
±0.5 |
±0.5 |
±0.5 |
|
Axial runout |
nm |
<180 |
<100 |
<100 |
|
Radial runout |
nm |
<450 |
<250 |
<250 |
|
Tilt error motion |
arcsec |
<1 |
<0.7 |
<0.7 |
|
Continuous torque |
N·m |
0.48 |
2.36 |
5.99 |
|
Max. velocity |
rpm |
1000 |
1000 |
1000 |
|
Mechanical specifications |
|
|
|
|
|
Dimensions |
mm |
120 |
180 |
220 |
|
Hollow aperture |
mm |
10 |
30 |
50 |
|
Max. load_Axial |
Kg |
8 |
30 |
66 |
|
Max. load_Radial |
Kg |
4 |
15 |
36 |
|
Operating pressure_Axial |
bar |
5±0.5 |
5±0.5 |
5±0.5 |
|
Operating pressure_Radial |
bar |
6±0.5 |
6±0.5 |
6±0.5 |
|
Total mass |
Kg |
4.5 |
6.1 |
8.3 |
|
Material |
|
Aviation aluminum,black anodized/hard anodized |
|
|
The series is configured with options that can be selected based on the user's actual application. Options include dimension, encoder and more.
|
Table 1 Dimension Options |
|
|
-120 |
120, Diameter |
|
-180 |
180, Diameter |
|
-220 |
220, Diameter |
|
Table 2 Encoder Options |
|
|
-S1 |
1Vpp/Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
RS422/Incremental digital optical linear encoder, RS422 |
|
-S3 |
BISS/Absolute optical linear encoder, BISS |
