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Stack Piezo Actuator

Precision Motion Systems
Vacuum Stage
Air-Bearing Stage
Single-Axis Stage
XY Stage
ZT Stage
Multi-Axis Stage
Specialty Motors
Voice Coil Motor
Maglev Voice Coil Motor
Water-Cooling Motor
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Piezo Products
Monolithic Piezo Actuator
Stack Piezo Actuator
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Square Piezoceramic Stack Actuator
Square Piezoceramic Stack Actuator
  • Operating voltage: -20 to +150V
  • 12 to 100um travel range
  • Vacuum compatible up to 10-6 Pa
  • Sub-nanometer resolution
  • Curie temperature: 230°C
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Square Piezoceramic Stack Actuator with Center Hole
Square Piezoceramic Stack Actuator with Center Hole
  • AC life span of 109 cycles
  • Compact structure
  • Microsecond response
  • Sub-nanometer resolution
  • Drive voltage -20 to +150V
  • High Curie temperature of 230°C
  • The through-hole in the middle facilitates heat dissipation
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Circular Piezoceramic Stack Actuator
Circular Piezoceramic Stack Actuator
  • AC life span of 109 cycles
  • Compact structure
  • Microsecond response
  • Sub-nanometer resolution
  • Drive voltage -20 to +150V
  • High Curie temperature of 230°C
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Ring-shape Piezoceramic Stack Actuator
Ring-shape Piezoceramic Stack Actuator
  • High service life
  • Microsecond response
  • Sub-nanometer resolution
  • Drive voltage -20 to +150V
  • High Curie temperature of 230°C
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