Semiconductor, Flat panel display, Optical fiber alignment, Biomedicine
The stage adopts integration, orthogonality design with a compact, low-profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from L2S125
|
Item |
L2S125-300 |
L2S125-400 |
|||
|
Axes name |
|
X |
Y |
X |
Y |
|
Travel range |
mm |
365 |
365 |
410 |
475 |
|
Max. velocity |
m/s |
1 |
1 |
1 |
1 |
|
Max. acceleration |
m/s² |
10 |
10 |
10 |
10 |
|
Accuracy_indicative value |
μm |
±20 |
±20 |
±20 |
±20 |
|
Accuracy_calibration value |
μm |
±1 |
±1 |
±1 |
±1 |
|
Bidirectional repeatability |
μm |
±0.4 |
±0.4 |
±0.4 |
±0.4 |
|
Straightness |
μm |
±3 |
±3.5 |
±3 |
±3.5 |
|
Flatness |
μm |
±2.5 |
±5 |
±2.5 |
±5 |
|
Pitch |
μm |
±5 |
±10 |
±5 |
±10 |
|
Roll |
μm |
±5 |
±10 |
±5 |
±10 |
|
Yaw |
μm |
±10 |
±10 |
±10 |
±10 |
|
Orthogonality |
μm |
±15 |
±15 |
±15 |
±15 |
|
Position stability（3σ）* |
nm |
±2 |
±2 |
±2 |
±2 |
|
Move1:10μm within±100nm* |
ms |
50 |
50 |
50 |
50 |
|
Move2:25mm within±100nm* |
ms |
140 |
140 |
140 |
140 |
|
Move3:80mm within±100nm* |
ms |
170 |
170 |
170 |
170 |
|
Mechanical specifications |
|
|
|
|
|
|
Moving mass (without payload)_Upper axis |
Kg |
3.6 |
3.6 |
4.5 |
4.5 |
|
Moving mass (without payload)_Lower axis |
Kg |
17 |
17 |
18.5 |
18.5 |
|
Max. load |
Kg |
2 |
2 |
6 |
6 |
|
Stage mass |
Kg |
29.5 |
29.5 |
32 |
32 |
|
Dimensions |
mm×mm×mm |
650×604×125 |
650×604×125 |
810×700×125 |
810×700×125 |
|
Material |
|
Aviationaluminum,blackanodized |
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*Technical data specified with 8μm pitch encoder and under active vibration isolation environment.
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more. X-axis base can be changed to marble base according to customer's requirement, which can provide higher positioning accuracy.
|
Table 1 Travel Options |
|
|
-300 |
365mmX365mm travel displacement platform with linear motors and limit |
|
-400 |
410mmX475mm travel displacement platform with linear motors and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
Standard, Renishaw Encoder |
|
-S2 |
High-end model, Heidenhain encoder |
|
Table 3 Guide Options |
|
|
-G1 |
High-stiffness roller guide |
|
-G2 |
High-precision balls guide |
