Laser cutting, Semiconductor, Flat panel display, Automation
The stage adopts compact and low-profile design, can realize the horizontal high precision, high stiffness linear motion.
*Interface dimensions from LTS165
|
Item |
LTS165-100 |
LTS165-200 |
LTS165-300 |
LTS165-400 |
LTS165-500 |
LTS165-600 |
|
|
Travel range |
mm |
100mm |
200mm |
300mm |
400mm |
500mm |
600mm |
|
Max. velocity |
m/s |
2 |
2 |
2 |
2 |
2 |
2 |
|
Max. acceleration |
g |
3g |
3g |
3g |
3g |
3g |
3g |
|
Accuracy |
μm |
±1 |
±1.5 |
±1.5 |
±1.5 |
±2 |
±2 |
|
Bidirectional repeatability |
μm |
±0.5 |
±0.5 |
±0.5 |
±0.5 |
±0.5 |
±0.5 |
|
Straightness |
μm |
±2.5 |
±4 |
±6 |
±8 |
±9 |
±10 |
|
Pitch |
|
29μrad (6arcsec) |
40μrad |
58μrad |
70μrad |
80μrad |
90μrad |
|
Roll |
|
29μrad |
40μrad |
58μrad |
70μrad |
80μrad |
90μrad |
|
Yaw |
|
29μrad |
40μrad |
58μrad |
70μrad |
80μrad |
90μrad |
|
Mechanical specifications |
|
|
|
|
|
|
|
|
Moving mass (without payload) |
Kg |
2.9 |
2.9 |
2.9 |
2.9 |
2.9 |
2.9 |
|
Max. load |
Kg |
40 |
40 |
40 |
40 |
40 |
40 |
|
Stage mass |
Kg |
9.1 |
10.8 |
12.5 |
14.2 |
15.8 |
17.5 |
|
Dimensions |
mm×mm×mm |
396×245×99.5 |
496×245×99.5 |
596×245×99.5 |
696×245×99.5 |
796×245×99.5 |
896×245×99.5 |
|
Material |
|
Aviation aluminum,black anodized |
|
|
|
|
|
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
|
Table 1 Travel Options |
|
|
-100 |
105mm travel stroke platform with linear motors and limit |
|
-200 |
205mm travel stroke platform with linear motors and limit |
|
-300 |
305mm travel stroke platform with linear motors and limit |
|
-400 |
405mm travel stroke platform with linear motors and limit |
|
-500 |
505mm travel stroke platform with linear motors and limit |
|
-600 |
605mm travel stroke platform with linear motors and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
1Vpp/Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
RS422/Incremental digital optical linear encoder, RS422 |
|
-S3 |
BISS/Absolute optical linear encoder, BISS |
