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Single-Axis Stage
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LTS165 Single-Axis Linear Stage
Features

  • Non-contact direct-drive linear motor drive for high dynamic response
  • Optical encoder for high precision
  • High stiffness, high precision heavy-duty mechanical guide design
  • Excellent positioning accuracy and dynamic performance

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Applications
  • Laser cutting
  • Semiconductor
  • Flat panel display
  • Automation
Description

The stage adopts compact and low-profile design, can realize the horizontal high precision, high stiffness linear motion.

Performance Chart

*Interface dimensions from LTS165

Technical Specifications
<<<Swipe left to see more parameters

 

LTS165-100

LTS165-200

LTS165-300

LTS165-400

LTS165-500

LTS165-600

Travel range

100 mm

200 mm

300 mm

400 mm

500 mm

600 mm

Max. velocity

2 m/s

Max. acceleration

3 g

Accuracy

±1 μm

±1.5 μm

±1.5 μm

±1.5 μm

±2 μm

±2 μm

Bidirectional repeatability

±0.5 μm

Straightness

±2.5 μm

±4 μm

±6 μm

±8 μm

±9 μm

±10 μm

Pitch

29μrad

(6arcsec)

40μrad
(8.2arcsec)

58μrad
(12arcsec)

70μrad
(14.4arcsec)

80μrad
(16.5arcsec)

90μrad
(18.6arcsec)

Roll

29μrad
(6arcsec)

40μrad
(8.2arcsec)

58μrad
(12arcsec)

70μrad
(14.4arcsec)

80μrad
(16.5arcsec)

90μrad
(18.6arcsec)

Yaw

29μrad
(6arcsec)

40μrad
(8.2arcsec)

58μrad
(12arcsec)

70μrad
(14.4arcsec)

80μrad
(16.5arcsec)

90μrad
(18.6arcsec)

Mechanical properties

 

 

 

 

 

 

Moving mass (without payload)

2.9 Kg

Max. load

40 Kg

Stage mass

9.1 Kg

10.8 Kg

12.5 Kg

14.2 Kg

15.8 Kg

17.5 Kg

Dimensions

396mm×245mm×99.5mm

496mm×245mm×99.5mm

596mm×245mm×99.5mm

696mm×245mm×99.5mm

796mm×245mm×99.5mm

896mm×245mm×99.5mm

Material

Aviation aluminum,black anodized

Customization Info

The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.

Table 1 Travel Options

-100

105mm travel stroke platform with linear motors and limit

-200

205mm travel stroke platform with linear motors and limit

-300

305mm travel stroke platform with linear motors and limit

-400

405mm travel stroke platform with linear motors and limit

-500

505mm travel stroke platform with linear motors and limit

-600

605mm travel stroke platform with linear motors and limit

Table 2 Encoder Options

-S1

Incremental analog optical encoder, 1Vpp

-S2

Incremental digital optical encoder, RS422

-S3

Absolute optical encoder, BISS

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