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Air-Bearing Stage
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LART150 Air-Bearing Rotary Stage
Features

  • High-load and precision air-bearing design
  • High repeatability and positioning accuracy
  • High level of machining technology
  • Customized requirements accepted

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Applications
  • Semiconductor equipment and laser field
Description

The compact design ensures that a large hollow (φ75) is realized within a very small height (65mm).
The stage provides ultra-smooth motion, angular second level accuracy and repeatability.

Performance Chart

*Interface dimensions from LART150

Technical Specifications
<<<Swipe left to see more parameters

 

LART150

Tabletop diameter

150 mm

Height

65 mm

Hollow aperture

75 mm

Max. velocity

800 rpm

Peak torque

8 N·m

Continuous torque

2.6 N·m

Accuracy

±1.5 arcsec

Bidirectional repeatability

±1 arcsec

Max. load_Axial

80 Kg

Max. load_Radial

30 Kg

Axial error motion (Synchronous)

<100 nm

Radial error motion(Synchronous)

<200 nm

Tilt error motion (Synchronous)

<2.5µrad (0.5arcsec)

Operating pressure

0.5 Mpa

Air consumption

<25 L/min

Total mass

5 Kg

Adapted driver

DC48V Driver

*Rotation velocity 60rpm based on the standard GBT+17421.7-2016(ISO230-7-2006)and GB/T17421.22000 as well as the temperature (22±0.5℃).

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