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Shear Piezo Motor Module

Precision Motion Systems
Vacuum Stage
Air-Bearing Stage
Single-Axis Stage
XY Stage
ZT Stage
Multi-Axis Stage
Specialty Motors
Voice Coil Motor
Maglev Voice Coil Motor
Water-Cooling Motor
Motor Module
Key Parts
Vacuum Chuck
Electrostatic Chuck&Controller
Dust-free Cable
Vacuum Optical Fiber Feedthrough Flange
Piezo Products
Monolithic Piezo Actuator
Stack Piezo Actuator
Bimorph Piezo Bender
Shear Piezo Motor Module
Preloaded Piezo Actuator
Walking Piezo Motor
Piezo Inertia Motor
Piezo Nano-Stage
Piezo Motor Driver
Shear-Type Piezoelectric Ceramic Stack
Shear-Type Piezoelectric Ceramic Stack
  • High service life
  • Sub-nanometer resolution
  • Drive voltage -250V to +250V
  • Ceramic packaging to ensure insulation performance
  • Suitable for high vacuum environments 10⁻⁷ Pa
  • High Curie temperature of 230°C
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Microstep Motor Module
Microstep Motor Module
  • Nanometer-level stepping accuracy
  • High repeatability
  • Microsecond-level response
  • Theoretical infinite travel
  • Self-locking upon power loss
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