Wafer production control applications, such as: thin film metrology and critical dimension metrology
The stage adopts low-profile design. The vertical uses the large-stroke maglev gravity compensation technology, which has the function of reducing the load of the vertical motor and greatly improving the vertical motion performance and lifetime. High-precision up-and-down positioning is possible. The vertical provides high stiffness mechanical bearing and high-performance air-bearing options. Air-bearing provide higher bidirectional repeatability.
*Interface dimensions from MZM200 in the middle of vertical stroke
|
Item |
Unit |
MZM200-10 |
|
Travel range |
mm |
10 |
|
Max. velocity |
mm/s |
100 |
|
Max. acceleration |
m/s² |
2 |
|
Accuracy |
μm |
±0.5 |
|
Bidirectional repeatability |
μm |
±0.2 |
|
Position stability（3σ） |
nm |
±15 |
|
Straightness |
μm |
2 |
|
Pitch |
|
100µrad(21arcsec) |
|
Roll |
|
100µrad(21arcsec) |
|
Yaw |
|
100µrad(21arcsec) |
|
Mechanical specifications |
|
|
|
Moving mass (without payload) |
Kg |
1.8 |
|
Max. load |
Kg |
6.2 |
|
Stage mass |
Kg |
3.5 |
|
Dimensions |
mm×mm |
S200×72 |
|
Material |
|
Aviation aluminum,black anodized |
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, guide, and more.
|
Table 1 Travel Options |
|
|
-5 |
5mm travel displacement platform with ring motor and limit |
|
-10 |
10mm travel displacement platform with ring motor and limit |
|
-25 |
25mm travel displacement platform with ring motor and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
1Vpp/Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
RS422/Incremental digital optical linear encoder, RS422 |
|
-S3 |
ISS/Absolute optical linear encoder, BISS |
|
Table 3 Guide Options |
|
|
-G1 |
High-stiffness mechanical guide |
|
-G2 |
High-performance air-bearing guide |
