Wafer production control applications, such as: thin film metrology and critical dimension metrology
The stage adopts low - profile design. The vertical uses the large - stroke maglev gravity compensation technology, which has the function of reducing the load of the vertical motor and greatly improving the vertical motion performance and lifetime. High - precision up - and - down positioning is possible. The vertical provides high stiffness mechanical bearing and high - performance air - bearing options. Air - bearing provides higher bidirectional repeatability.
*Interface dimensions from MZM200 in the middle of vertical stroke
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|
MZM200-10 |
|
Travel range |
10 mm |
|
Max. velocity |
100 mm/s |
|
Max. acceleration |
2 m/s² |
|
Accuracy |
±0.5 μm/1 mm |
|
Bidirectional repeatability |
±0.3 μm/1mm |
|
Position stability (3σ) |
±50 nm |
|
Straightness |
2 μm |
|
Pitch |
100 μrad (21 arcsec) |
|
Roll |
100 μrad (21 arcsec) |
|
Yaw |
100 μrad (21arcsec) |
|
Moving mass (without payload) |
1.8 Kg |
|
Max. load |
6.2 Kg |
|
Stage mass |
3.5 Kg |
|
Dimensions |
S200 mm×72 mm |
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Material |
Aviation aluminum, black anodized |
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, guide, and more.
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Table 1 Travel Options |
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|
-5 |
5mm travel displacement platform with ring motor and limit |
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-10 |
10mm travel displacement platform with ring motor and limit |
|
-25 |
25mm travel displacement platform with ring motor and limit |
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Table 2 Encoder Options |
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|
-S1 |
1Vpp/Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
RS422/Incremental digital optical linear encoder, RS422 |
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-S3 |
ISS/Absolute optical linear encoder, BISS |
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Table 3 Guide Options |
|
|
-G1 |
High-stiffness mechanical guide |
|
-G2 |
High-performance air-bearing guide |
