HS1000 METIS Multi-axis Motion System
HS1000 METIS Multi-axis Motion System
- Integrated 5 - axis stage with orthogonality design
- Flatness and straightness up to sub - um level
- Hybrid application of mechanical guide and air - bearing guide
- X/Y axis: High stiffness, high precision guide; Consistent design of aledistraing free; High - performance air - bearing guide for excellent dynamic flatness over the entire stroke
- Z - axis: Vertical maglev gravity compensation for high positioning accuracy; High stiffness, high precision guide; Ultra - thin, lightweight and modularization design; Vertical mechanical travel up to 30mm
- T - axis: 360° rotation, no tubing wrapping; 12, 8, 6' wafer applicable; Rotation velocity up to 150rpm
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