Electrostatic Chuck Controller
Electrostatic Chuck Controller
- Provide two phase voltages of equal magnitude and opposite phase
- Provide the penetration voltage for wafer use
- Provide capacitance detection, for indicator of no-wafer, wafer-clamped, and release status
- Provide penetration detection, for indicator of penetration status
- LCD displayer, with the value of clamping and penetration voltage,resistance and capacitance detection
VIEW MORE>
