The stage is manufactured with materials that meet ultra-high vacuum standards and special processes in IS06 cleanrooms, ensuring that it can be used in ultra-high vacuum environments of 10-5Pa and below. While realizing high-precision and high-stiffness XY motion, it also ensures the thermal management and magnetic shielding needs in the vacuum environment.
*Interface dimensions from VLS200
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VLS200-08 |
VLS200-12 |
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Axes name |
X |
Y |
X |
Y |
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Travel range |
300 mm |
220 mm |
400 mm |
320 mm |
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Max. velocity |
0.35 m/s |
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Max. acceleration |
0.4 g |
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Accuracy |
±0.5 μm |
±0.5 μm |
±0.5 μm |
±0.5 μm |
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Bidirectional repeatability |
±0.25 μm |
±0.25 μm |
±0.25 μm |
±0.25 μm |
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Position stability（3σ）* |
±5 nm |
±5 nm |
±5 nm |
±5 nm |
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Velocity stability* |
<0.1% |
<0.1% |
<0.1% |
<0.1% |
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Straightness |
4 μm |
4 μm |
4 μm |
4 μm |
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Pitch |
<10 arcsec |
<10 arcsec |
<10 arcsec |
<10 arcsec |
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Yaw |
<10 arcsec |
<10 arcsec |
<10 arcsec |
<10 arcsec |
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Mechanical properties |
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Moving mass (without payload) |
52 Kg |
7 Kg |
53.5 Kg |
9 Kg |
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Max. load |
13.5 Kg |
13.5 Kg |
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Stage mass |
100 Kg |
145 Kg |
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Dimensions |
670 mm×630 mm×200 mm |
810mm ×714 mm×200 mm |
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Material |
Aluminum alloy |
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*Technical data specified under non-active vibration damping environment.
The series is configured with options that can be selected based on the user's actual application. Options include encoders, control system, and more.
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Table 1 Guide Options |
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-G1 |
Normal linear guide for UHV |
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-G2 |
Non-magnetic linear guide for UHV |
