Shanghai YiNGUAN Semiconductor Technology Co., LTD

CN
产品中心详情页
Vacuum Stage
HOME > PRODUCTS > Precision Motion Systems > Vacuum Stage
VLS200 XY Stage
VLS200 XY Stage
VLS200 XY Stage
Features

  • Suitable for ultra-high vacuum environment up to 10-5Pa
  • Vacuum linear motor drive for low outgassing rate, low heat generation 
  • Unique linear motor magnetic shielding design
  • Optional non-magnetic materials, with overall magnetic leakage up to nT level.
  • Excellent velocity and position stability

Download
Applications

Electron beam inspection, Electron beam lithography, Scanning electron microscopy

Description

The stage is manufactured with materials that meet ultra-high vacuum standards and special processes in IS06 cleanrooms, ensuring that it can be used in ultra-high vacuum environments of 10-5Pa and below. While realizing high-precision and high-stiffness XY motion, it also ensures the thermal management and magnetic shielding needs in the vacuum environment.

Interface Definition

*Interface dimensions from VLS200

Technical Specifications
<<<Swipe left to see more parameters

Item

 

VLS200-08

VLS200-12

Axes name

 

X

Y

X

Y

Travel range

mm

300

220

400

320

Max. velocity

m/s

0.35

0.35

0.35

0.35

Max. acceleration

g

0.4

0.4

0.4

0.4

Accuracy

μm

±1

±1

±1

±1

Bidirectional repeatability

μm

±0.5

±0.5

±0.5

±0.5

Position stability(3σ)*

nm

±5

±5

±5

±5

Velocity stability*

 

<0.1%

<0.1%

<0.1%

<0.1%

Straightness

μm

7.5

7.5

7.5

7.5

Pitch

arcsec

<20

<20

<20

<20

Yaw

arcsec

<20

<20

<10

<10

Mechanical specifications

 

 

 

 

 

Moving mass (without payload)

Kg

52

7

53.5

9

Max. load

Kg

13.5

13.5

13.5

13.5

Stage mass

Kg

100

100

145

145

Dimensions

mm×mm×mm

670×630×200

810×714×200

Material

 

Aluminum alloy

 

*Technical data specified under non-active vibration damping environment.

Customization Information

The series is configured with options that can be selected based on the user's actual application. Options include encoders, control system, and more.

Table 1 Guide Options

-G1

Normal linear guide for UHV

-G2

Non-magnetic linear guide for UHV

Contact
© 2019-2024   Shanghai YiNGUAN Semiconductor Technology Co., LTD   www.yg-st.com   All rights reserved ICP备案:沪ICP备19035819号