Electron beam inspection, Electron beam lithography, Scanning electron microscopy
The stage is manufactured with materials that meet ultra-high vacuum standards and special processes in IS06 cleanrooms, ensuring that it can be used in ultra-high vacuum environments of 10-5Pa and below. While realizing high-precision and high-stiffness XY motion, it also ensures the thermal management and magnetic shielding needs in the vacuum environment.
*Interface dimensions from VLS200
|
Item |
Unit |
VLS200-08 |
VLS200-12 |
||
|
Axes name |
|
X |
Y |
X |
Y |
|
Travel range |
mm |
300 |
220 |
400 |
320 |
|
Max. velocity |
m/s |
0.35 |
0.35 |
0.35 |
0.35 |
|
Max. acceleration |
g |
0.4 |
0.4 |
0.4 |
0.4 |
|
Accuracy |
μm |
±1 |
±1 |
±1 |
±1 |
|
Bidirectional repeatability |
μm |
±0.5 |
±0.5 |
±0.5 |
±0.5 |
|
Position stability（3σ）* |
nm |
±5 |
±5 |
±5 |
±5 |
|
Velocity stability* |
|
<0.1% |
<0.1% |
<0.1% |
<0.1% |
|
Straightness |
μm |
7.5 |
7.5 |
7.5 |
7.5 |
|
Pitch |
arcsec |
<20 |
<20 |
<20 |
<20 |
|
Yaw |
arcsec |
<20 |
<20 |
<10 |
<10 |
|
Mechanical specifications |
|
|
|
|
|
|
Moving mass (without payload) |
Kg |
52 |
7 |
53.5 |
9 |
|
Max. load |
Kg |
13.5 |
13.5 |
13.5 |
13.5 |
|
Stage mass |
Kg |
100 |
100 |
145 |
145 |
|
Dimensions |
mm×mm×mm |
670×630×200 |
810×714×200 |
||
|
Material |
|
Aluminum alloy |
|
||
*Technical data specified under non-active vibration damping environment.
The series is configured with options that can be selected based on the user's actual application. Options include encoders, control system, and more.
|
Table 1 Guide Options |
|
|
-G1 |
Normal linear guide for UHV |
|
-G2 |
Non-magnetic linear guide for UHV |
