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Single-Axis Stage
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RD180 Mechanical-Bearing Rotary Stage
Features

  • Zero cogging force motor technology for high velocity stability
  • Optical encoder for high precision
  • Infinition angle motion with optional rotation angle hard limit
  • Vacuum feed-through to the chuck level, support for multi-airway air supply
  • Excellent positioning accuracy and dynamic performance
  • High accuracy of axial runout and radial runout

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Applications
  • Wafer process control
  • Wafer dicing
  • Wafer scribing
  • Laser heat processing
  • Photovoltaic cell production
Description

The stage adopts low-profile design. High-precision, high-stiffness, infinition rotation in the T axis.

Performance Chart

*Interface dimensions from RD180

Technical Specifications
<<<Swipe left to see more parameters

 

RD180-00

Accuracy_indicative value*

±30 arcsec

Accuracy_calibration value*

±3 arcsec

Bidirectional repeatability*

±2 arcsec

Axial runout

±3 μm

Radial runout

±3.5 μm

Tilt error motion

10 arcsec

Continuous torque

2.4 N·m

Max. velocity

150 rpm

Position stability(3σ)*

±0.072 arcsec

Move1:1 deg within±40μdeg*

100 ms

Move2:180 deg within±40μdeg*

500 ms

Mechanical properties

Dimensions

284 mm×284 mm

Max. load_Axial

7 Kg

Max. load_Radial

3 Kg

Inertia (No load)

0.00038 Kg•m²

*Technical data specified with 20μm pitch encoder and under active vibration isolation environment.

Customization Info

The series is configured with options that can be selected based on the user's actual application. Options include encoder, Chuck air supply, control system and more.

Table 1 Encoder Options

-S1

Standard,Renishaw Encoder

-S2

High-end model, Heidenhain encoder

Table 2 Chuck Air Supply Options

-C1

Chuck with single air supply

-C2

Chuck with dual air supply

-C3

Chuck with triple air supply

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