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Piezo Nano-Stage

Precision Motion Systems
Vacuum Stage
Air-Bearing Stage
Single-Axis Stage
XY Stage
ZT Stage
Multi-Axis Stage
Specialty Motors
Voice Coil Motor
Maglev Voice Coil Motor
Water-Cooling Motor
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Vacuum Optical Fiber Feedthrough Flange
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Shear Piezo Motor Module
Preloaded Piezo Actuator
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Piezo Nano-Stage
Piezo Motor Driver
Piezoelectric Stepping Motor Stage - ZTT
Piezoelectric Stepping Motor Stage - ZTT
  • Using piezoelectric stepping motor as motion actuators, high drive force, high holding force
  • Multi-axis parallel control
  • Millimeter-level large travel range
  • Integrated high-precision encoder, nanometer resolution
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