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YiNGUAN specializes in high-precision motion systems that supply key components to the semiconductor and LCD industries. The product portfolio includes precision motion systems, advanced piezoelectric actuators, specialty mo-tors, high-precision motion drivers and controllers.

PRODUCTS PRODUCT

Piezo Products
Stack Piezo Actuator
Preloaded Piezo Actuator
Piezo Stepping Motor
Piezo Inertia Motor
Piezo Stage
Piezo Motor Controller
Specialty Motors
Voice Coil Motor
Maglev Voice Coil Motor
Water-Cooling Motor
Motor Module
Key Parts
Vacuum Chuck
Electrostatic Chuck&Controller
Dust-free Cable
Vacuum Optical Fiber Feedthrough Flange
Precision Motion Systems
Vacuum Stage
Air-Bearing Stage
Single-Axis Stage
XY Stage
ZT Stage
Multi-Axis Stage
Piezoelectric Material
Piezoelectric Material
  • Suitable for precision motion.
  • Wide range of application fields.
  • Vacuum compatible, not affected by electromagnetic interference.
  • Possesses a certain level of mechanical strength and high compressive resistance.
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Piezo Chip Actuator
Piezo Chip Actuator
  • AC lifetime: 10⁹ cycles.  
  • Operating voltage: -20 to +150V.
  • Microsecond-level response.  
  • Vacuum compatible up to 10⁻⁶ Pa.
  • Sub-nanometer resolution.  
  • Curie temperature of 230°C.
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Piezo Chip Actuator - Round
Piezo Chip Actuator - Round
  • AC lifetime: 10⁹ cycles
  • Compact structure
  • Microsecond-level response
  • Vacuum compatible up to 10⁻⁶ Pa
  • Sub-nanometer resolution
  • Curie temperature: 230°C
  • Operating voltage: -20 to +150V 
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Piezo Chip Actuator - Ring
Piezo Chip Actuator - Ring
  • AC lifetime: 10⁹ cycles
  • Compact structure
  • Microsecond-level response
  • Vacuum compatible up to 10⁻⁶ Pa
  • Sub-nanometer resolution
  • Curie temperature: 230°C
  • Operating voltage: -20 to +150V
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Piezoelectric Inertia Motor
Piezoelectric Inertia Motor
  • High-speed displacement
  • High resolution
  • Compact size
  • Suitable for high vacuum environments
  • Applicable in non-magnetic environments
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Piezo Bender Actuator
Piezo Bender Actuator
  • AC lifetime: 10⁹ cycles
  • Microsecond-level response
  • Vacuum compatible up to 10⁻⁶ Pa
  • Operating voltage: -20 to +150V
  • Curie temperature: 230°C
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A5 series Preloaded Piezo Actuator
A5 series Preloaded Piezo Actuator
  • 1000N thrust
  • Piezoelectric ceramics with lifetime of one billion cycles
  • Sub-nanometer resolution
  • Simple structure, compact size
  • Vacuum compatible up to 10⁻⁵ Pa
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B5 series Preloaded Piezo Actuator
B5 series Preloaded Piezo Actuator
  • Piezoelectric ceramics with lifetime of one billion cycles
  • Sub-nanometer resolution
  • Simple structure, compact size
  • Vacuum compatible up to 10⁻⁵ Pa
  • Threaded interface, optional flat and spherical end caps
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B7 series Preloaded Piezo Actuator
B7 series Preloaded Piezo Actuator
  • 2000N thrust
  • Piezoelectric ceramics with lifetime of one billion cycles
  • Sub-nanometer resolution
  • Simple structure, compact size
  • Vacuum compatible up to 10⁻⁵ Pa
  • Threaded interface, optional flat and spherical end caps
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C5 series Preloaded Piezo Actuator
C5 series Preloaded Piezo Actuator
  • 1000N thrust
  • Piezoelectric ceramics with lifetime of one billion cycles
  • Sub-nanometer resolution
  • Simple structure, compact size
  • Vacuum compatible up to 10⁻⁵ Pa
  • Integrated spherical end cap
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C7 series Preloaded Piezo Actuator
C7 series Preloaded Piezo Actuator
  • 2000N thrust
  • Piezoelectric ceramics with lifetime of one billion cycles
  • Sub-nanometer resolution
  • Simple structure, compact size
  • Vacuum compatible up to 10⁻⁵ Pa
  • Integrated spherical end cap
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Piezoelectric Stepping Motor
Piezoelectric Stepping Motor
  • High drive force
  • Nano precision
  • High static holding force
  • Large travel range
  • High resolution
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