The stage adopts modularization, ultra-thin, orthogonality design, the MZM200-10 Stage standard module is integrated on top of the cross platform L2S125 for high precision, high stiffness linear motion of X, Y and Z axis with 3 degrees of freedom.
The MZM200-10 uses the large-stroke maglev gravity compensation technology, which has the function of reducing the load of the vertical motor and greatly improving the vertical motion performance and lifetime. High-precision up-and-down positioning is possible.
The L2S125 adopts integration, orthogonality design with a compact, low-profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from L3S190 in the upper limit
|
|
X |
Y |
Z |
|
Axes name |
X |
Y |
Z |
|
Travel range |
350 mm |
350 mm |
9 mm (customizable) |
|
Max. velocity |
0.6 m/s |
0.6 m/s |
0.1 m/s |
|
Max. acceleration |
5 m/s² |
5 m/s² |
2 m/s² |
|
Accuracy_indicative value |
±20 μm |
±20 μm |
- |
|
Accuracy_calibration value |
±2 μm |
±2 μm |
±0.5 μm/1 mm |
|
Bidirectional repeatability |
±1 μm |
±1 μm |
±0.3 μm/1mm |
|
Straightness |
±10 μm |
±10 μm |
- |
|
Pitch |
±75 arcsec |
±50 arcsec |
±50 arcsec |
|
Roll |
- |
- |
±50 arcsec |
|
Yaw |
±75 arcsec |
±75 arcsec |
- |
|
Orthogonality |
|
5 μm |
- |
|
Moving mass (without payload) |
14.2 Kg |
27.5 Kg |
6.7 Kg |
|
Max. load |
|
5 Kg |
|
|
Stage mass |
|
40 Kg |
|
|
Dimensions |
|
734 mm×600 mm×187 mm (vertical upper limit) |
|
The series is configured with options that can be selected based on the user's actual application. Options include encoders, guide, and more.
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Table 1 Encoder Options |
|
|
-S1 |
Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
Incremental digital optical linear encoder, TTL |
|
-S3 |
Absolute optical linear encoder, BISS |
|
Table 2 Guide Options |
|
|
-G1 |
High-stiffness mechanical guide |
|
-G2 |
High-performance air-bearing guide |
