High stiffness, high precision guide
Consistent design of cable disturbing force
Vertical magnetic levitation gravity compensation for high positioning accuracy
High stiffness, high precision guide
Vertical incremental encoder for up to 5nm resolution
Ultra-thin, lightweight design
Vertical mechanical travel up to 30mm
Wafer production control applications such as: thin film metrology and critical dimension metrology, Wafer scribing, Wafer laser thermal annealing
The stage adopts modularization, ultra-thin, orthogonality design, the MZM200-10 Stage standard module is integrated on top of the cross platform L2S125 for high precision, high stiffness linear motion of X, Y and Z axis with 3 degrees of freedom.
The MZM200-10 uses the large-stroke maglev gravity compensation technology, which has the function of reducing the load of the vertical motor and greatly improving the vertical motion performance and lifetime. High-precision up-and-down positioning is possible.
The L2S125 adopts integration, orthogonality design with a compact, low-profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from L3S190 in the upper limit
|
Item |
Unit |
L3S190-350 |
||
|
Axes name |
|
X |
Y |
Z |
|
Travel range |
mm |
350 |
350 |
9 (customizable) |
|
Max. velocity |
m/s |
0.6 |
0.6 |
0.1 |
|
Max. acceleration |
m/s² |
5 |
5 |
2 |
|
Accuracy_indicative value |
μm |
±20 |
±20 |
- |
|
Accuracy_calibration value |
μm |
±2 |
±2 |
±0.5 |
|
Bidirectional repeatability |
μm |
±1 |
±1 |
±1μm |
|
Straightness |
μm |
±10 |
±10 |
- |
|
Pitch |
arcsec |
±75 |
±50 |
±50 |
|
Roll |
|
- |
- |
±50 |
|
Yaw |
|
±75 |
±75 |
- |
|
Orthogonality |
μm |
5 |
5 |
- |
|
Mechanical specifications |
|
|
|
|
|
Moving mass (without payload) |
Kg |
14.2 |
27.5 |
6.7 |
|
Max. load |
Kg |
5 |
5 |
5 |
|
Stage mass |
Kg |
40 |
40 |
40 |
|
Dimensions |
mm×mm×mm |
734×600×187(vertical upper limit) |
||
The series is configured with options that can be selected based on the user's actual application. Options include encoders, guide, and more.
|
Table 1 Encoder Options |
|
|
-S1 |
Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
Incremental digital optical linear encoder, TTL |
|
-S3 |
Absolute optical linear encoder, BISS |
|
Table 2 Guide Options |
|
|
-G1 |
High-stiffness mechanical guide |
|
-G2 |
High-performance air-bearing guide |
