X/Y axis
Z-axis
T-axis
Wafer production control applications
such as: thin film metrology, critical dimension metrology, Wafer scribing, Wafer laser thermal annealing
The stage adopts modularization, ultra-thin, orthogonality design to integrate the MZT90 standard module on the cross platform L2S125 for high-precision, high-stiffness motion of X, Y, Z and T axes with 4 degrees of freedom.
The MZT90 adopts innovative dual-axis coupling design with extremely compact profile. High precision, high stiffness motion with 2 degrees of freedom in vertical and rotary axes.
The L2S125 adopts integration, orthogonality design with a compact, low-profile. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from L4S210 in the middle stroke
|
Item |
L4S210-350 |
||||
|
Axes name |
|
X |
Y |
Z |
T |
|
Travel range |
|
350 mm |
350 mm |
10 mm |
360°,Infinite |
|
Max. velocity |
|
1 m/s |
1 m/s |
0.1 m/s |
900°/s |
|
Max. acceleration |
|
10 m/s² |
10 m/s² |
2 m/s² |
6280°/s² |
|
Accuracy_indicative value |
|
±10 μm |
±10 μm |
|
|
|
Accuracy_calibration value |
|
±1 μm |
±1 μm |
0.03 μm |
±3 arcsec |
|
Bidirectional repeatability |
|
±0.5 μm |
±0.5 μm |
±0.2 μm |
±2 arcsec |
|
Position stability（3σ） |
|
±2 nm* |
±2 nm* |
±15 nm* |
±0.072 arcsec |
|
Straightness |
|
±2 μm over range |
±2 μm over range |
1μm |
|
|
Pitch |
|
±5 arcsec |
±5 arcsec |
|
|
|
Roll |
|
±5 arcsec |
±5 arcsec |
|
|
|
Yaw |
|
±10 arcsec |
±10 arcsec |
|
|
|
Orthogonality |
|
±15 arcsec |
±15 arcsec |
|
|
|
Axial & Radial runout |
|
NA |
NA |
NA |
±2 μm |
|
Mechanical specifications |
|
|
|
|
|
|
Moving mass (without payload) |
|
27 Kg |
45 Kg |
7 Kg |
0.00336 Kg.m² |
|
Max. load |
Kg |
2 (customizable) |
|
|
|
|
Stage mass |
Kg |
40 Aluminum alloy |
|
|
|
|
Dimensions |
mm×mm×mm |
752×606×209.1 (middle of stroke) |
|
|
|
*Technical data specified with 8μm pitch encoder and under active vibration isolation environment.
The series is configured with options that can be selected based on the user's actual application. Options include encoders, Coarse Z strokes, and more.
|
Table 1 Encoder Options |
|
|
-S1 |
Incremental analog optical linear encoder,1Vpp |
|
-S2 |
Incremental digital optical linear encoder, TTL |
|
-S3 |
Absolute optical linear encoder, BISS |
|
Table 2 Vertical guide Options |
|
|
-G1 |
High-precision air-bearing guide with a vertical mechanical stroke of 6mm |
|
-G2 |
High-precision cross roller guide with a vertical mechanical stroke of 24mm |
|
-G3 |
High-precision anti-creep cross roller guide with vertical mechanical travel of 13mm |
