The multi-axis micropositioning stage offers four independent degrees offreedom, including infinite theta rotation, Z-axis motion, and Tip-Tiltcorrection.
The Z3T70 is highly compactwhile providing excellent position ing accuracy and dynamic performance.
This module not only improves the motion system's accuracy and simplifies the design for users, but also enhances reliability and integration, reduces complexity and overall cost,and improves the price-to-performance ratio.
Its unique maglev gravity compensation technology signifi cantly reduces heat generation in the vertical actuator, thereby ensuring nanometer-level positioning accuracy along the vertical axis.
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Z3T70-40 |
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Fine Z |
Tip-Tilt |
Theta |
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Motor Type |
DD |
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Load |
2 Kg |
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Drive Control |
ACS |
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Ambient Temperature |
22±1 °C |
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Travel range |
4 mm |
±0.1° |
infinite |
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Drive Mass (excluding chuck) |
4 Kg |
/ |
2 kg |
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Module Mass (excluding chuck) |
10 Kg |
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Max. Axial Load |
2.2 Kg |
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Max. velocity |
0.03 m/s |
- |
15 rad/s |
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Max. acceleration |
0.5 m/s² |
- |
100 rad/s² |
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Position stability |
±10 nm |
- |
±0.05 µrad |
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Unidirectional Repeatability |
- |
- |
- |
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Bidirectional Repeatability |
±0.05 µm |
- |
±0.5 arcsec |
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Radial runout |
- |
- |
±3.5 µm |
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Axial runout |
- |
- |
±3 µm |
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Signal Type |
Incremental |
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Output Signal |
TTL |
1Vpp |
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The series is configured with options that can be selected based on theuser's actual application. Options include encoders, and more
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-S1 |
Incremental analog optical encoder, lVpp |
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-S2 |
Increment aldigital optical encoder, RS422 |
