High stiffness linear guide
Non-contact direct-drive linear motor drive for high dynamic response
Active air/water cooling design
Maglev gravity compensation technology in vertical for high positioning accuracy
High stiffness, high precision guide
Ultra-thin, lightweight design
Modularization design
Vertical mechanical travel up to 30mm
360°rotation, no tubing wrapping
12', 8', 6' wafer applicable
Active air/water cooling design
Wafer warpage up to 0.7mm
Rotation velocity up to 150rpm
Wafer production control applications
such as: thin film metrology, critical dimension metrology, etc
The stage adopts highly modularization, ultra-thin design. High-precision and high-stiffness linear and rotary motions with 3 degrees of freedom in X, Z and T axes.
The vertical uses the large-stroke maglev gravity compensation technology, which has the function of reducing the load of the vertical motor and greatly improving the vertical motion performance and lifetime.
*Interface dimensions from PS150 in the lower limit
|
Item |
Unit |
PS150-155 |
||
|
Axes name |
|
X |
Z |
T |
|
Travel range |
|
155 mm |
25 mm |
360°,Infinite |
|
Max. velocity |
|
400 mm/s |
40 mm/s |
900°/s |
|
Max. acceleration |
|
4m/s² |
1m/s² |
6280°/s² |
|
Accuracy |
|
±1μm |
±0.4μm |
±3 arcsec |
|
Bidirectional repeatability |
|
±0.5μm |
±0.2μm/1mm |
±2 arcsec |
|
Straightness |
|
6 μm |
NA |
NA |
|
Pitch |
|
±20μrad |
NA |
NA |
|
Roll |
|
±20μrad |
NA |
NA |
|
Yaw |
|
±20μrad |
NA |
NA |
|
Axial runout |
|
NA |
NA |
±2 μm |
|
Radial runout |
|
NA |
NA |
±2 μm |
|
Mechanical specifications |
|
|
|
|
|
Moving mass (without payload) |
|
12 |
5.4 |
NA |
|
Inertia (No load) |
Kg•m² |
0.00401 |
0.00401 |
0.00401 |
|
Max. load |
Kg |
2(customizable) |
|
|
|
Stage mass |
Kg |
44 |
44 |
44 |
|
Dimensions |
mm×mm×mm |
460×362×156.4 (vertical lower limit) |
|
|
|
Material |
|
Aviation aluminum, anodized |
|
|
The series is configured with options that can be selected based on the user's actual application. Options include encoders, guide, and more.
|
Table 1 Encoder Options |
|
|
-S1 |
Incremental analog optical encoder, 1Vpp, 20μm Pitch |
|
-S2 |
Incremental digital optical encoder, TTL, 20μm Pitch |
|
-S3 |
Absolute optical encoder, BISS-C, 20μm Pitch |
|
Table 2 Vertical Mechanical Stroke Options |
|
|
-10 |
with vertical mechanical stroke of 10mm |
|
-20 |
with vertical mechanical stroke of 20mm |
|
-25 |
with vertical mechanical stroke of 25mm |
