The electrostatic chuck controller, which is a bipolar reversible power supply, specially designed for the application of electrostatic chuck for clamping Wafer in vacuum environment. Through the two high voltage connectors of the controller, 0~500V high voltage is injected into the electrostatic chuck with opposite polarity, and the release voltage with opposite polarity can also be provided. In addition, the controller can realize the function of penetrating the Wafer and provide 1000~4000V penetration voltage to the electrostatic chuck through the penetration voltage interface. At the same time, the controller can monitor the clamping/release status of Wafer as well as the result of the penetration.

The controller, with DB9 interface, which can communicate with the host computer, control the functions of the controller by sending commands from the host computer, and monitor the running status of the controller.