The microstep motor ceramic module is composed of multiple layers of piezoelectric ceramics (mechanically connected in series) with interdigitated electrodes (electrodes parallel to each other). It includes a certain number of piezoelectric ceramic thickness slices and shear slices, which can produce displacement along the Z - axis. It achieves long travel by raising the thickness slices and advancing the shear slices, similar to the crawling motion of a caterpillar.
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PANL-R001-14-16H4Q |
PANL-S06-22-5H7Q |
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Active axes |
Z/X |
Z/X |
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Height uniformity |
≤0.03 mm |
≤0.03 mm |
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Coplanarity of the top surface |
≤5 μm |
≤5 μm |
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Bottom surface coplanarity |
≤5 μm |
≤5 μm |
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Top-to-bottom surface parallelism |
≤10 μm |
≤10 μm |
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Actuating voltage of shear-mode ceramics |
-250 V~+250 V |
-250 V~+250 V |
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Longitudinal piezoelectric ceramic drive voltage |
-250 V~+250 V |
-250 V~+250 V |
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Shear piezoelectric ceramic displacement (Y-axis displacement) |
≥±2 μm@± 250 V |
≥±7 μm@±250V |
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Longitudinal piezoelectric ceramic displacement (Z-axis displacement) |
≥3 μm@500 Vp-p(±250 V) |
≥0.9 μm@500 Vp-p(±250 V) |
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Maximum output force of shear piezoelectric ceramics |
≥±100 N@±250V |
≥±50 N@±250V |
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Maximum output force of longitudinal piezoelectric ceramics |
≥2000 N@+250 V |
≥700 N@+250 V |
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Longitudinal mechanical stiffness of a single piezoelectric ceramic leg |
≥500 N/μm |
≥250 N/μm |
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Capacitance of shear piezoelectric ceramics |
≤40 nF±15%@1 Vp-p&1 kHz |
≤45 nF±15%@1 Vp-p&1 kHz |
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Capacitance of longitudinal piezoelectric ceramics |
≤150 nF±15%@1 Vp-p&1 kHz |
≤40 nF±15%@1 Vp-p&1 kHz |
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Hysteresis nonlinearity of shear piezoelectric ceramics @500Vp-p |
≤40% |
≤40% |
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Operating temperature |
-25 °C~130 °C |
-25 °C~130 °C |
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Curie temperature |
280 °C |
280 °C |
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Dimensions - L |
33 mm±0.1 mm |
13 mm±0.1 mm |
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Dimensions - W |
10 mm±0.1 mm |
13 mm±0.1 mm |
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Dimensions - H |
15 mm±0.005 mm |
8.7 mm±0.005 mm |
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PANL-S06-22-7H5Q |
PANL-S06-22-12Q |
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Active axes |
Z/X |
Z/X |
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Height uniformity |
≤0.03 mm |
≤0.03 mm |
|
Coplanarity of the top surface |
≤5 μm |
≤5 μm |
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Bottom surface coplanarity |
≤5 μm |
≤5 μm |
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Top-to-bottom surface parallelism |
≤10 μm |
≤10 μm |
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Actuating voltage of shear-mode ceramics |
-250 V~+250 V |
-250 V~+250 V |
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Longitudinal piezoelectric ceramic drive voltage |
-250 V~+250 V |
— |
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Shear piezoelectric ceramic displacement (Y-axis displacement) |
≥±5 μm@± 250 V |
≥±12 μm@±250V |
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Longitudinal piezoelectric ceramic displacement (Z-axis displacement) |
≥1.5 μm@500 Vp-p(±250 V) |
— |
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Maximum output force of shear piezoelectric ceramics |
≥±50 N@±250V |
≥±50 N@±250V |
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Maximum output force of longitudinal piezoelectric ceramics |
≥1000 N@+250 V |
— |
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Longitudinal mechanical stiffness of a single piezoelectric ceramic leg |
≥250 N/μm |
≥250 N/μm |
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Capacitance of shear piezoelectric ceramics |
≤30 nF±15%@1 Vp-p&1 kHz |
≤90 nF±15%@1 Vp-p&1 kHz |
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Capacitance of longitudinal piezoelectric ceramics |
≤60 nF±15%@1 Vp-p&1 kHz |
— |
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Hysteresis nonlinearity of shear piezoelectric ceramics @500Vp-p |
≤40% |
≤40% |
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Operating temperature |
-25 °C~130 °C |
-25 °C~130 °C |
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Curie temperature |
280 °C |
280 °C |
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Dimensions - L |
13 mm±0.1 mm |
13 mm±0.1 mm |
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Dimensions - W |
13 mm±0.1 mm |
13 mm±0.1 mm |
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Dimensions - H |
8.7 mm±0.005 mm |
8.7 mm±0.005 mm |
*Displacement Measurement: Drive voltage -250V to 250V, tolerance ±15%.
** Dimensions: The marked dimensions refer to the size of the single - side ceramic module, excluding the circuit board.
***Capacitance Measurement Conditions: Room temperature environment, 1 Vpp, 1 kHz, tolerance ±15%.
