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Stack Piezo Actuator
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Piezo Chip Actuator
Piezo Chip Actuator
Piezo Chip Actuator
Features

  • AC lifetime: 10⁹ cycles.  
  • Operating voltage: -20 to +150V.
  • Microsecond-level response. 
  • Vacuum compatible up to 10⁻⁶ Pa.
  • Sub-nanometer resolution.  
  • Curie temperature of 230°C.

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Applications

Industrial automation, Life Science, Scientific research, Semiconductor equipment, Optical adjustment

Description

The Piezo Chip Actuator consists of multiple ceramic layers and electrode layers stacked and intersected internally, with external electrodes printed on both sides to lead out the internal electrodes. Through precision grinding processes, the height tolerance of each piezoelectric ceramic is controlled to be smaller than ±5μm. The company has achieved seamless integration from piezoelectric ceramic powder to the finished actuator, and mass production has been implemented. Currently, the products are applied in the fields of nanoscale positioning, precision manufacturing, and dispensing valve technology.

Technical Specifications
<<<Swipe left to see more parameters

Technical Indicators

Unit

Tolerance

PAA-S2-2

PAA-S3-2

PAA-S5-2

PAA-S7-2

PAA-S10-2

Dimensions

mm×mm×mm

 

2×2×2

3×3×2

5×5×2

7×7×2

10×10×2

Displacement

μm

±15%

2.2

2.2

2.2

2.2

2.2

Push force

N

Max. value

160

360

1000

2000

4000

Electrical capacitance

nF

±15%

22

70

225

390

800

Resonant frequency

kHz

Max. value

500

500

500

500

500

 

*Displacement test: drive voltage range 0 to 150V

**Thrust test: drive voltage range 0 to 150V

***Capacitance test conditions: ambient temperature environment, 1Vpp/1kHz

 

The tolerance of dimension A*B within ±10μm, and the tolerance of H within ±5μm

The default configuration does not involve soldering wire harness for the Piezo Chip Actuator

Optional soldering of standard wiring harness available, length 75mm, AWG32, PTFE insulation, followed by 'W' in the product code

Other specifications can be customized on request

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