The Piezo Miniature Stepping drive principle enables nanometer precision and high drive force.
Piezoelectric Stepping Motor is a new type of bionic piezoelectric actuator, which is driven by multiple groups of multi-dimensional piezoelectric actuator units according to the step-by-step multi-group action logic to realize the linear motion of the motor mover.
It features small size, high drive force, high holding force under static conditions, and no thermal power consumption. It can achieve high subdivision in a single step to achieve high resolution at nanometer level, and the step-by-step motion mode can achieve a large motion stroke at millimeter level.
Optional incremental encoder for high-precision positioning is available.
The non-contact encoder can directly detect the displacement of the moving face, which avoids the position error caused by indirect displacement detection to the greatest extent.
Suitable for applicaitons in complex vacuum environments.
Vacuum version is optional. Its motor has no thermal power consumption under static condition and does not generate magnetic fields.
外形尺寸，单位:mm
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Unit |
Tolerance |
PMNL-T23-ZT20A |
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Active axes |
Z |
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Motion & Positioning |
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Travel range in Z |
mm |
±10 |
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Travel range in rX |
deg |
±1.1 |
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Travel range in rY |
deg |
±1 |
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Sensor |
Linear encoder |
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Open loop resolution |
nm |
1 |
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Sensor resolution |
nm |
5 |
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Sensor signal |
AqB |
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Unidirectional repeatability in Z |
nm |
Typical value |
±50 |
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Unidirectional repeatability in rX |
Typical value |
±1.2 μrad (0.25 arcsec) |
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Unidirectional repeatability in rY |
Typical value |
±1 μrad (0.21 arcsec) |
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Bidirectional repeatability in Z |
nm |
Typical value |
±100 |
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Bidirectional repeatability in rX |
Typical value |
±2.4 μrad (0.5 arcsec) |
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Bidirectional repeatability in rY |
Typical value |
±2 μrad (0.42 arcsec) |
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Velocity |
mm/s |
Max. value |
1 |
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Mechanical properties |
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Vertical drive force |
N |
Typical value |
200 |
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Vertical holding force |
N |
Min. value |
300 |
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Drive properties |
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Operating voltage |
V |
-250~250V |
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Miscellaneous |
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Operating temperature range |
°C |
0~50 |
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Material |
Aluminum alloy, stainless steel |
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Cable length |
m |
±0.02m |
1.5 |
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Motor interface |
Sub-D25 male connector |
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Sensor connection |
HD-Sub44 male connector |
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Dimensions |
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Length |
mm |
240 |
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Width |
mm |
240 |
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Height |
mm |
70~96 |
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* Actual motion velocity depend on the power of the drive control circuit
