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Piezoelectric Stepping Motor Stage - ZTT
Piezoelectric Stepping Motor Stage - ZTT
Piezoelectric Stepping Motor Stage - ZTT
Features

  • Using piezoelectric stepping motor as motion actuators, high drive force, high holding force
  • Multi-axis parallel control
  • Millimeter-level large travel range
  • Integrated high-precision encoder, nanometer resolution

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Applications
  • Structural levelling, height adjustment  
  • Non-magnetic environment
  • Vacuum without heating environment
  • Precision semiconductor equipment
  • Precision medical testing equipment
Description

The Piezo Miniature Stepping drive principle enables nanometer precision and high drive force.

Piezoelectric Stepping Motor is a new type of bionic piezoelectric actuator, which is driven by multiple groups of multi-dimensional piezoelectric actuator units according to the step-by-step multi-group action logic to realize the linear motion of the motor mover.
It features small size, high drive force, high holding force under static conditions, and no thermal power consumption. It can achieve high subdivision in a single step to achieve high resolution at nanometer level, and the step-by-step motion mode can achieve a large motion stroke at millimeter level.

Interface Definition

外形尺寸,单位:mm

Technical Specifications
<<<Swipe left to see more parameters

 

Unit

Tolerance

PMNL-T23-ZT20A

Active axes

   

Z

Motion & Positioning

Travel range in Z

mm

 

±10

Travel range in rX

deg

 

±1.1

Travel range in rY

deg

 

±1

Sensor

   

Linear encoder

Open loop resolution

nm

 

1

Sensor resolution

nm

 

5

Sensor signal

   

AqB

Unidirectional repeatability in Z

nm

Typical value

±50

Unidirectional repeatability in rX

 

Typical value

±1.2 μrad (0.25 arcsec)

Unidirectional repeatability in rY

 

Typical value

±1 μrad (0.21 arcsec)

Bidirectional repeatability in Z

nm

Typical value

±100

Bidirectional repeatability in rX

 

Typical value

±2.4 μrad (0.5 arcsec)

Bidirectional repeatability in rY

 

Typical value

±2 μrad (0.42 arcsec)

Velocity

mm/s

Max. value

1

Mechanical properties

Vertical drive force

N

Typical value

200

Vertical holding force

N

Min. value

300

Drive properties

Operating voltage

V

 

-250~250V

Miscellaneous

Operating temperature range

°C

 

0~50

Material

   

Aluminum alloy, stainless steel

Cable length

m

±0.02m

1.5

Motor interface

   

Sub-D25 male connector

Sensor connection

   

HD-Sub44 male connector

Dimensions

Length

mm

 

240

Width

mm

 

240

Height

mm

 

70~96

 

* Actual motion velocity depend on the power of the drive control circuit

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