Semiconductor, Flat panel display, Optical fiber alignment, Biomedicine especially suitable for, Double-sided processing, Genetic detection
The stage adopts XY unibody, orthogonality design with ultra-thin profile and large aperture size. High-precision, high-stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from PLA90
|
Item |
PLA90-100 |
PLA90-200 |
PLA90-300 |
|
|
Travel range |
mm |
±50 |
±100 |
±150 |
|
Max. velocity |
m/s |
1 |
1 |
1 |
|
Max. acceleration |
g |
1 |
1 |
1 |
|
Accuracy |
μm |
±0.5 |
±0.5 |
±0.5 |
|
Bidirectional repeatability |
μm |
±0.25 |
±0.25 |
±0.25 |
|
Straightness |
μm |
±2 |
±2 |
±2 |
|
Flatness |
μm |
±2 |
±2 |
±2 |
|
Pitch |
|
40µrad |
50µrad |
60µrad |
|
Roll |
|
30µrad |
40µrad |
50µrad |
|
Yaw |
|
20µrad |
30µrad |
40µrad |
|
Orthogonality |
|
97µrad |
97µrad |
97µrad |
|
Mechanical specifications |
|
|
|
|
|
Moving mass_Upper axis |
Kg |
13.8 |
8.6 |
19.8 |
|
Moving mass_Lower axis |
Kg |
5.8 |
16.8 |
11.2 |
|
Max. load |
Kg |
20 |
25 |
45 |
|
Stage mass |
Kg |
11 |
21 |
34 |
|
Dimensions |
mm×mm×mm |
380×380×90 |
380×380×90 |
410×410×90 |
|
Material |
|
Aviation aluminum, black anodized |
|
|
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
|
Table 1 Travel Options |
|
|
-100 |
100mm travel stroke platform with linear motors and limit |
|
-200 |
200mm travel stroke platform with linear motors and limit |
|
-300 |
300mm travel stroke platform with linear motors and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
Incremental analog optical linear encoder, 1Vpp |
|
-S2 |
Incremental digital optical linear encoder, RS422 |
|
-S3 |
Absolute optical linear encoder, BISS |
