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XY Stage
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PLA90 Flat XY stage with Aperture
PLA90 Flat XY stage with Aperture
PLA90 Flat XY stage with Aperture
Features

  • Non - contact direct - drive linear motor drive for high dynamic response
  • Optical linear encoder for high precision
  • High stiffness anti - creep cross roller guide
  • Excellent positioning accuracy and dynamic performance
  • Large hollow aperture

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Applications
  • Semiconductor
  • Flat panel display
  • Optical fiber alignment
  • Biomedicine
  • Double - sided processing
  • Genetic detection
Description

The stage adopts XY unibody, orthogonality design with ultra - thin profile and large aperture size. High - precision, high - stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.

Interface Definition

 *Interface dimensions from PLA90

Technical Specifications
<<<Swipe left to see more parameters

 

PLA90-100

PLA90-200

PLA90-300

Travel range

±50 mm

±100 mm

±150 mm

Max. velocity

0.3 m/s

0.5 m/s

0.5 m/s

Max. acceleration

0.4 g

0.4 g

0.4 g

Accuracy

±1.5 μm

±2 μm

±2 μm

Bidirectional repeatability

±1.5 μm

±0.5 μm

±2 μm

Straightness

±2 μm

±3 μm

±4 μm

Flatness

±2 μm

±3 μm

±4 μm

Pitch

15 arcsec

20 arcsec

25 arcsec

Roll

15 arcsec

20 arcsec

25 arcsec

Yaw

15 arcsec

20 arcsec

25 arcsec

Orthogonality

12 arcsec

15 arcsec

20 arcsec

Moving mass_Upper axis

5.8 Kg

8.4 Kg

11 Kg

Moving mass_Lower axis

14.5 Kg

17.1 Kg

19.7 Kg

Max. load

10 Kg

10 Kg

10 Kg

Stage mass

21 Kg

25.5 Kg

30 Kg

Dimensions

380 mm×380 mm×90 mm

380 mm×380 mm×90 mm

430 mm×430 mm×90 mm

Material

Aviation aluminum, black anodized

Aviation aluminum, black anodized

Avia

Customization Info

The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.

Table 1 Travel Options

-100

100mm travel stroke platform with linear motors and limit

-200

200mm travel stroke platform with linear motors and limit

-300

300mm travel stroke platform with linear motors and limit

Table 2 Encoder Options

-S1

Incremental analog optical linear encoder, 1Vpp

-S2

Incremental digital optical linear encoder, RS422

-S3

Absolute optical linear encoder, BISS

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