The stage adopts XY unibody, orthogonality design with ultra - thin profile and large aperture size. High - precision, high - stiffness linear motion in horizontal X/Y axis with 2 degrees of freedom.
*Interface dimensions from PLA90
|
|
PLA90-100 |
PLA90-200 |
PLA90-300 |
|
Travel range |
±50 mm |
±100 mm |
±150 mm |
|
Max. velocity |
0.3 m/s |
0.5 m/s |
0.5 m/s |
|
Max. acceleration |
0.4 g |
0.4 g |
0.4 g |
|
Accuracy |
±1.5 μm |
±2 μm |
±2 μm |
|
Bidirectional repeatability |
±1.5 μm |
±0.5 μm |
±2 μm |
|
Straightness |
±2 μm |
±3 μm |
±4 μm |
|
Flatness |
±2 μm |
±3 μm |
±4 μm |
|
Pitch |
15 arcsec |
20 arcsec |
25 arcsec |
|
Roll |
15 arcsec |
20 arcsec |
25 arcsec |
|
Yaw |
15 arcsec |
20 arcsec |
25 arcsec |
|
Orthogonality |
12 arcsec |
15 arcsec |
20 arcsec |
|
Moving mass_Upper axis |
5.8 Kg |
8.4 Kg |
11 Kg |
|
Moving mass_Lower axis |
14.5 Kg |
17.1 Kg |
19.7 Kg |
|
Max. load |
10 Kg |
10 Kg |
10 Kg |
|
Stage mass |
21 Kg |
25.5 Kg |
30 Kg |
|
Dimensions |
380 mm×380 mm×90 mm |
380 mm×380 mm×90 mm |
430 mm×430 mm×90 mm |
|
Material |
Aviation aluminum, black anodized |
Aviation aluminum, black anodized |
Avia |
The series is configured with options that can be selected based on the user's actual application. Options include travel, encoder, and more.
|
Table 1 Travel Options |
|
|
-100 |
100mm travel stroke platform with linear motors and limit |
|
-200 |
200mm travel stroke platform with linear motors and limit |
|
-300 |
300mm travel stroke platform with linear motors and limit |
|
Table 2 Encoder Options |
|
|
-S1 |
Incremental analog optical encoder, 1Vpp |
|
-S2 |
Incremental digital optical encoder, RS422 |
|
-S3 |
Absolute optical encoder, BISS |
