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Stack Piezo Actuator
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Piezo Stack Actuator
Piezo Stack Actuator
Piezo Stack Actuator
Features

  • Operating voltage: -20 to +150V
  • 2 to 100μm travel range
  • Vacuum compatible up to 10⁻⁶ Pa
  • Sub-nanometer resolution
  • Curie temperature: 230°C

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Applications

Scientific research, Precision optical adjustment equipment, Industrial automation, Semiconductor equipment

Precision motion control, Precision inspection equipment

Description

Piezo Stack Actuator adopts structure of stacked piezoelectric ceramic sheets, which achieves the superposition output of multi-layer ceramic response displacement under electrical signal excitation, with sub millisecond level response time and maximum displacement exceeding 100μm. Our company has various kinds of piezoelectric ceramic actuators. The performance of our products can reach the advanced level of similar products of international companies. Currently, our piezoelectric ceramic actuator has achieved mass production.

Technical Specifications
<<<Swipe left to see more parameters
 

Dimensions

Displacement

Push force

Electrical capacitance

Resonant frequency

 

mm×mm×mm

μm

N

μF

kHz

     

Max. value

   

PAB-S3-5

3×3×5

5

360

0.14

250

PAB-S3-9

3×3×9

10

360

0.25

140

PAB-S5-5

5×5×5

5

1000

0.45

250

PAB-S5-9

5×5×9

10

1000

0.85

140

PAB-S5-20

5×5×20

20

1000

1.6

70

PAB-S5-36

5×5×36

40

1000

3.2

34

PAB-S5-45

5×5×45

50

1000

3.8

27

PAB-S7-9

7×7×9

10

2000

1.5

140

PAB-S7-20

7×7×20

20

2000

3

70

PAB-S7-36

7×7×36

40

2000

6

34

PAB-S7-45

7×7×45

50

2000

9

27

PAB-S7-60

7×7×60

66

2000

11.2

21

PAB-S7-90

7×7×90

100

2000

16

14

PAB-S10-18

10×10×18

20

4000

6

70

PAB-S10-36

10×10×36

40

4000

13

34

 

The cross-sectional dimensions within ±0.1mm tolerance, and the length dimension within standard tolerance of ±0.1mm. 
Tolerance can be reduced to ±10μm for special request

Displacement dimensions within ±20% tolerance

Optional soldering of standard wiring harness available, length 75mm, AWG32, PTFE insulation, followed by 'W' in the product code

 

*Displacement test: drive voltage range 0 to 150V, tolerance ±20%
**Thrust test: drive voltage range 0 to 150V
***Capacitance test conditions: ambient temperature environment, 1Vpp, 1kHz, tolerance ±20%
Other specifications can be customized on request

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