Precision adjustment of the lithographic lens, Precision electron microscope adjustment, Non-magnetic environment

Vacuum without heating environment, Precision semiconductor equipment, Precision medical testing equipment, Space Science

The Piezo Miniature Stepping drive principle enables nanometer precision and high drive force.
  Piezoelectric Stepping Motor is a new type of bionic piezoelectric actuator, which is driven by multiple groups of multi-dimensional piezoelectric actuator units according to the step-by-step multi-group action logic to realize the linear motion of the motor mover.It features small size, high drive force, high holding force under static conditions, and no thermal power consumption. It can achieve high subdivision in a single step to achieve high resolution at nanometer level, and the step-by-step motion mode can achieve a large motion stroke at millimeter level.

Optional incremental encoder for high-precision positioning is available.
  The non-contact encoder can directly detect the displacement of the moving face, which avoids the position error caused by indirect displacement detection to the greatest extent.

Suitable for applications in complex vacuum environments.
  Vacuum version is optional. Its motor has no thermal power consumption under static condition and does not generate magnetic fields.