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Piezo Stepping Motor
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Piezoelectric Stepping Motor
Piezoelectric Stepping Motor
Piezoelectric Stepping Motor
Features

  • High drive force
  • Nano precision
  • High static holding force
  • Large travel range
  • High resolution

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Applications

Lens precision adjustment, Precision electron microscope adjustment, Non-magnetic environment

Vacuum without heating environment, Precision semiconductor equipment, Precision medical testing equipment

Description

The Piezo Miniature Stepping drive principle enables nanometer precision and high drive force.
  Piezoelectric Stepping Motor is a new type of bionic piezoelectric actuator, which is driven by multiple groups of multi-dimensional piezoelectric actuator units according to the step-by-step multi-group action logic to realize the linear motion of the motor mover.It features small size, high drive force, high holding force under static conditions, and no thermal power consumption. It can achieve high subdivision in a single step to achieve high resolution at nanometer level, and the step-by-step motion mode can achieve a large motion stroke at millimeter level.

Optional incremental encoder for high-precision positioning is available.
 
The non-contact encoder can directly detect the displacement of the moving face, which avoids the position error caused by indirect displacement detection to the greatest extent.

Suitable for applications in complex vacuum environments.
  Vacuum version is optional. Its motor has no thermal power consumption under static condition and does not generate magnetic fields.

Interface Definition

Technical Specifications
<<<Swipe left to see more parameters

 

Unit Tolerance

PMNL-C05-10N

PMNL-C10-10N

Active axes

 

 

X

X

Motion & Positioning

 

 

 

 

Travel range

mm

 

10

10

Travel range (analog mode)

μm

 

±2

±2

Sensor

 

 

-

-

Open loop resolution

nm

Typical value

1

1

Closed loop resolution

nm

 

-

-

Velocity

mm/s

Max. value

1

1

Max. drive frequency

Hz

±20%

250

250

Mechanical properties

 

 

 

 

Drive force

N

Max. value

50

100

Holding force

N

Min. value

70

130

Drive properties

 

 

 

 

Operating voltage

V

 

-250~+250

-250~+250

Miscellaneous

 

 

 

 

Operating temperature range

°C

 

0~55

0~55

Material

 

 

Aluminum, stainless steel, titanium

Aluminum, stainless steel, titanium

Mass

g

±5%

115

160

Cable length

m

±0.05m

2

2

Motor interface

 

 

Sub-D15 male connector

Sub-D15 male connector

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