Wafer process control applications such as optical critical dimension metrology and thin film metrology.
Wafer scribing, cleaning, and cutting, Laser heat processing of wafer, Lithography backend
The stage adopts innovative dual-axis coupling design with extremely compact and low-profile. High precision, high stiffness motion with 2 degrees of freedom in vertical and rotary axes.
Rotary axis can be rotated indefinitely.
The vertical uses the large-stroke maglev gravity compensation technology, which has the function of reducing the load of the vertical motor and greatly improving the vertical motion performance and lifetime.
This product can be used in a standalone mode or mounted on top of an XY platform.
*Interface dimensions from MZT90 in the middle of vertical stroke
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Item |
MZT90-10 |
MZT90-20 |
MZT90-25 |
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|
Axes name |
|
Z |
T |
Z |
T |
Z |
T |
|
Travel range |
|
10 mm |
360°,Infinite |
20 mm |
360°,Infinite |
25 mm |
360°,Infinite |
|
Max. velocity |
|
100 mm/s |
900°/s |
100 mm/s |
900°/s |
100 mm/s |
900°/s |
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Max. acceleration |
|
2 m/s² |
6280°/s² |
2 m/s² |
6280°/s² |
2 m/s² |
6280°/s² |
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Accuracy |
|
±0.6μm/1mm |
±3 arcsec |
±0.6μm/1mm |
±3 arcsec |
±0.6μm/1mm |
±3 arcsec |
|
Bidirectional repeatability |
|
±0.3μm/1mm |
±2 arcsec |
±0.3μm/1mm |
±2 arcsec |
±0.3μm/1mm |
±2 arcsec |
|
Position stability（3σ） |
|
±15 nm* |
±0.2 arcsec |
±15 nm* |
±0.2 arcsec |
±15 nm* |
±0.2 arcsec |
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Straightness |
|
2 μm |
NA |
2 μm |
NA |
2 μm |
NA |
|
Axial runout |
|
NA |
±2 μm |
NA |
±2 μm |
NA |
±2 μm |
|
Radial runout |
|
NA |
±2 μm |
NA |
±2 μm |
NA |
±2 μm |
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Mechanical specifications |
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Moving mass (without payload) |
Kg |
8.2 |
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|
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Inertia (No load) |
Kg•m² |
0.00336 |
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Max. load |
Kg |
2(customizable) |
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|
Stage mass |
Kg |
9.1 |
9.1 |
12.3 |
12.3 |
12.3 |
12.3 |
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Dimensions |
mm×mm×mm |
409×306.7×73.5 (without load) |
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Material |
|
Aviation aluminum |
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The series is configured with options that can be selected based on the user's actual application. Options include encoder, and more.
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Table 1 Encoder Options |
|
|
-S1 |
Standard, Renishaw Encoder |
|
-S2 |
High-end model, Heidenhain encoder |
