Piezoelectric Inertia Motor - Piezo Inertia Motor - Shanghai YiNGUAN Semiconductor Technology Co., LTD

Applications

Optical stage, Precision semiconductor equipment, Precision medical testing equipment, Aerospace

Description

Piezoelectric Inertia Motor is a linear motion positioning device based on stick-slip drive logic, which can achieve millimeter-level motion stroke and nanometer-level positioning accuracy, with the advantages of small size, high stiffness and fast positioning, the motor integrates high-precision closed-loop sensors, which is very suitable for nano-micro displacement control systems.

Interface Definition

Technical Specifications

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	Unit	Tolerance	PMIN-C24-50A-SS	PMIN-C24-50A-AL	PMIN-C24-110A
Active axes			X	X	X
Motion & Positioning
Travel range	mm		50	50	110
Sensor			Linear grating scale	Linear grating scale	Linear grating scale
Open loop resolution	nm		1	1	1
Sensor resolution	nm		40	40	40
Sensor signal			AqB	AqB	AqB
Min. displacement	nm	Typical value	-	-	-
Unidirectional repeatability	nm	Typical value	500	500	500
Bidirectional repeatability	nm	Typical value	800	800	800
Pitch	arcsec	Typical value	50	50	50
Yaw	arcsec	Typical value	50	50	50
Closed loop velocity	mm/s	Max. value	10	10	10
Mechanical properties
Max. vertical load capacity	N	Max. value	30	30	30
Guide type			Crossed roller guide	Crossed roller guide	Crossed roller guide
Drive force	N	Typical value	＞1.5	＞1.2	＞1.0
Holding force	N	Min. value	＞2.0	＞2.0	＞1.5
Drive properties
Operating voltage	V		0~70	0~70	0~70
Miscellaneous
Operating temperature range	°C		0~50	0~50	0~50
Material			stainless steel	Aluminum alloy, stainless steel	stainless steel
Cable length	m	±0.02m	2	2	2
Motor interface			Sub-D15 male connector	Sub-D15 male connector	Sub-D15 male connector
Dimensions
A	mm		24	24	24
B	mm		11.5	11.5	11.5
L	mm		75	75	180

	Unit	Tolerance	PMIN-C24-20A	PMIN-C24-30A-SS	PMIN-C24-30A-AL
Active axes			X	X	X
Motion & Positioning
Travel range	mm		20	30 (Asymmetry)	30（Asymmetry）
Sensor			Linear grating scale	Linear grating scale	Linear grating scale
Open loop resolution	nm		1	1	1
Sensor resolution	nm		40	40	40
Sensor signal			AqB	AqB	AqB
Min. displacement	nm	Typical value	-	-	-
Unidirectional repeatability	nm	Typical value	500	500	500
Bidirectional repeatability	nm	Typical value	800	1000	1000
Pitch	arcsec	Typical value	50	50	50
Yaw	arcsec	Typical value	50	50	50
Closed loop velocity	mm/s	Max. value	10	10	10
Mechanical properties
Max. vertical load capacity	N	Max. value	30	30	30
Guide type			Crossed roller guide	Crossed roller guide	Crossed roller guide
Drive force	N	Typical value	＞1.5	＞1.5	＞1.2
Holding force	N	Min. value	＞2.0	＞2.0	＞2.0
Drive properties
Operating voltage	V		0~70	0~70	0~70
Miscellaneous
Operating temperature range	°C		0~50	0~50	0~50
Material			stainless steel	stainless steel	Aluminum alloy, stainless steel
Cable length	m	±0.02m	2	2	2
Motor interface			Sub-D15 male connector	Sub-D15 male connector	Sub-D15 male connector
Dimensions
A	mm		24	24	24
B	mm		11.5	11.5	11.5
L	mm		45	45	45

* Actual motion velocity depend on the power of the drive control circuit

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