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Piezo Inertia Motor
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Piezoelectric Inertia Motor
Piezoelectric Inertia Motor
Piezoelectric Inertia Motor
Features

  • High-speed displacement
  • High resolution
  • Compact size
  • Suitable for high vacuum environments

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Applications
  • Optical stage
  • Precision semiconductor equipment
  • Precision medical testing equipment
Description

Piezoelectric Inertia Motor is a linear motion positioning device based on stick-slip drive logic, which can achieve millimeter-level motion stroke and nanometer-level positioning accuracy, with the advantages of small size, high stiffness and fast positioning, the motor integrates high-precision closed-loop sensors, which is very suitable for nano-micro displacement control systems.

Interface Definition

 

Technical Specifications
<<<Swipe left to see more parameters

 

PMIN-C24X-20A

PMIN-C24X-30A

Unit

Tolerance

Active Axes

X

X

 

 

Travel range

20

30

mm

 

Sensor

Linear encoder

Linear encoder

 

 

Open loop resolution

1

1

nm

 

Sensor resolution

40

40

nm

 

Sensor signal

AqB(Microstep box output)

AqB(Microstep box output)

 

 

Min. displacement

-

-

nm

Typical value

Unidirectional repeatability

500

500

nm

Typical value

Bidirectional repeatability

800

1000

nm

Typical value

Pitch

50

50

arcsec

Typical value

Yaw

50

50

arcsec

Typical value

Closed loop velocity*

10

10

mm/s

Max. value

Max. vertical load capacity

30

30

N

Max. value

Guide type

Cross roller guide

Cross roller guide

 

 

Motor type

Stick - slip inertial motor

Stick - slip inertial motor

 

 

Drive force

1.5

1.5

N

Typical value

Holding force

2.0

2.0

N

Min. value

Operating voltage

0 - 70

0 - 70

V

 

Operating temperature range

0 - 50

0 - 50

°C

 

Drive frequency range

2k - 15k(Recommended Drive Frequency Range:5k - 7kHz)

2k - 15k(Recommended Drive Frequency Range:5k - 7kHz)

kHz

 

Material

Aluminum Alloy/Stainless Steel (Base defaults to Stainless Steel)

Aluminum Alloy/Stainless Steel (Base defaults to Stainless Steel)

 

 

Cable length

2

2

m

±0.02 m

Motor interface

Sub - D15 male connector

Sub - D15 male connector

 

 

Dimensions - A

24

24

mm

 

Dimensions - B

11.5

11.5

mm

 

Dimensions - L

45

45

mm

 

 

 

PMIN-C24X-50A

PMIN-C24X-110A

Unit

Tolerance

Active Axes

X

X

 

 

Travel range

50

110

mm

 

Sensor

Linear encoder

Linear encoder

 

 

Open loop resolution

1

1

nm

 

Sensor resolution

40

40

nm

 

Sensor signal

AqB(Microstep box output)

AqB(Microstep box output)

 

 

Min. displacement

-

-

nm

Typical value

Unidirectional repeatability

500

500

nm

Typical value

Bidirectional repeatability

800

800

nm

Typical value

Pitch

50

50

arcsec

Typical value

Yaw

50

50

arcsec

Typical value

Closed loop velocity*

10

10

mm/s

Max. value

Max. vertical load capacity

30

30

N

Max. value

Guide type

Cross roller guide

Cross roller guide

 

 

Motor type

Stick - slip inertial motor

Stick - slip inertial motor

 

 

Drive force

1.5

1.0

N

Typical value

Holding force

2.0

1.5

N

Min. value

Operating voltage

0 - 70

0 - 70

V

 

Operating temperature range

0 - 50

0 - 50

°C

 

Drive frequency range

2k - 15k(Recommended Drive Frequency Range:5k - 7kHz)

2k - 15k(Recommended Drive Frequency Range:5k - 7kHz)

kHz

 

Material

Aluminum Alloy/Stainless Steel (Base defaults to Stainless Steel)

Aluminum Alloy/Stainless Steel (Base defaults to Stainless Steel)

 

 

Cable length

2

2

m

±0.02 m

Motor interface

Sub - D15 male connector

Sub - D15 male connector

 

 

Dimensions - A

24

24

mm

 

Dimensions - B

11.5

11.5

mm

 

Dimensions - L

75

180

mm

 

 

*PMIN-C24X-50A models default to a stainless steel base. For lightweight requirements, an aluminum alloy version (-AL) is available.
-AL: Aluminum alloy base
* The actual operating speed depends on the power of the drive and control circuit.
* Maximum vertical load: 30N, provided that the center of gravity of the load is located at the center of the motor.
All specifications are based on room temperature conditions (22±3°C).
Usage Precautions:
1. The motor must be used in a clean indoor environment;
2. The motor must be used in conjunction with the drive and control unit provided by YG. 

Customization Info

PIN

1

2

3

4

5

6

7

8

Definition

Sin+

Sin

Cost

Cos -

Index+

Index

1

HV -

PIN

9

10

11

12

13

14

15

 

Definition

GND

Vs

GND

Vs

1

1

HV+

 

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