Optical stage, Precision semiconductor equipment, Precision medical testing equipment, Aerospace
Piezoelectric Inertia Motor is a linear motion positioning device based on stick-slip drive logic, which can achieve millimeter-level motion stroke and nanometer-level positioning accuracy, with the advantages of small size, high stiffness and fast positioning, the motor integrates high-precision closed-loop sensors, which is very suitable for nano-micro displacement control systems.
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Technical Indicators |
Unit |
Tolerance |
PMIN-C24-20A |
PMIN-C24-30A-SS |
PMIN-C24-30A-AL |
PMIN-C24-50A-SS |
PMIN-C24-50A-AL |
PMIN-C24-110A |
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Active axes |
|
|
X |
X |
X |
X |
X |
X |
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Motion & Positioning |
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|
|
|
|
|
|
|
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Travel range |
mm |
|
20 |
30 (Asymmetric) |
30 (Asymmetric) |
50 |
50 |
110 |
|
Sensor |
|
|
Linear grating ruler |
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Open loop resolution |
nm |
|
1 |
1 |
1 |
1 |
1 |
1 |
|
Sensor resolution |
nm |
|
40 |
40 |
40 |
40 |
40 |
40 |
|
Sensor signal |
|
|
AqB |
AqB |
AqB |
AqB |
AqB |
AqB |
|
Min. displacement |
nm |
Typical value |
- |
- |
- |
- |
- |
- |
|
Unidirectional repeatability |
nm |
Typical value |
500 |
500 |
500 |
500 |
500 |
500 |
|
Bidirectional repeatability |
nm |
Typical value |
800 |
1000 |
1000 |
800 |
800 |
800 |
|
Pitch |
arcsec |
Typical value |
50 |
50 |
50 |
50 |
50 |
50 |
|
Yaw |
arcsec |
Typical value |
50 |
50 |
50 |
50 |
50 |
50 |
|
Closed loop velocity |
mm/s |
Max. value |
10 |
10 |
10 |
10 |
10 |
10 |
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Mechanical properties |
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|
|
|
|
|
|
|
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Max. vertical load capacity |
N |
Max. value |
30 |
30 |
30 |
30 |
30 |
30 |
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Guide type |
|
|
Cross roller guide rail |
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Drive force |
N |
Typical value |
＞1.5 |
＞1.5 |
＞1.2 |
＞1.5 |
＞1.2 |
＞1.0 |
|
Holding force |
N |
Min. value |
＞2.0 |
＞2.0 |
＞2.0 |
＞2.0 |
＞2.0 |
＞1.5 |
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Drive properties |
|
|
|
|
|
|
|
|
|
Operating voltage |
V |
|
0~70 |
0~70 |
0~70 |
0~70 |
0~70 |
0~70 |
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Miscellaneous |
|
|
|
|
|
|
|
|
|
Operating temperature range |
°C |
|
0~50 |
0~50 |
0~50 |
0~50 |
0~50 |
0~50 |
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Material |
|
|
stainless steel |
stainless steel |
Aluminum alloy,stainless steel |
stainless steel |
Aluminum alloy,stainless steel |
stainless steel |
|
Cable length |
m |
±0.02m |
2 |
2 |
2 |
2 |
2 |
2 |
|
Motor interface |
|
|
Sub-D15 |
Sub-D15 |
Sub-D15 |
Sub-D15 |
Sub-D15 |
Sub-D15 |
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Dimensions |
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|
|
|
|
|
|
|
|
A |
mm |
|
24 |
24 |
24 |
24 |
24 |
24 |
|
B |
mm |
|
11.5 |
11.5 |
11.5 |
11.5 |
11.5 |
11.5 |
|
L |
mm |
|
45 |
45 |
45 |
75 |
75 |
180 |
* Actual motion velocity depend on the power of the drive control circuit
