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Piezoelectric Stepping Motor Stage - Linear
Piezoelectric Stepping Motor Stage - Linear
Piezoelectric Stepping Motor Stage - Linear
Features

  • High drive force
  • Nano precision
  • High static holding force
  • Large travel range
  • High resolution
  • Suitable for high vacuum environments

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Applications
  • Precision adjustment of the lithographic lens
  • Precision electron microscope adjustment
  • Non-magnetic environment
  • Vacuum without heating environment
  • Precision semiconductor equipment
  • Precision medical testing equipment
Description

Piezoelectric Stepping Motor Stage - Linear, a motion stage based on Piezoelectric Stepping Motor, the linear drive of the moving axis is realized by the step-by-step drive mode of the piezo ceramic motor. 
This stage features small size, large drive force, can maintain high holding force under static condition, no heat power consumption, no magnetic leakage, with millimeter-level large motion stroke and nanometer-level high resolution.

Interface Definition

Technical Specifications
<<<Swipe left to see more parameters
 

Unit

Tolerance

PMNL-A02-20

Active axes

   

X

Motion & Positioning

Travel range

mm

 

20

Travel range in X (analog mode)

μm

 

±2

Sensor

   

-

Open loop resolution

nm

 

1

Closed loop resolution

nm

 

-

Velocity

mm/s

Max. value

0.6

Max. drive frequency

Hz

±20%

150

Mechanical properties

Drive force

N

Max. value

20

Holding force

N

Min. value

30

Drive properties

Operating voltage

V

 

-250~+250

Miscellaneous

Operating temperature range

°C

 

0~55

Material

   

Stainless steel, titanium alloy

Mass

g

±5%

255

Cable length

m

±0.05m

2

Motor interface

   

Sub-D15 male connector

 

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