APPLICATIONS - Shanghai YiNGUAN Semiconductor Technology Co., LTD

E-beam Lithography (EBL) motion systems

E-beam lithography (e-beam lithography; EBL) begin in the 1960s. It’s a kind of maskless lithography developed on the basis of electron microscopes for microcircuit research and manufacturing.

Electron beam high vacuum precision motion laser interferometer

Smart Coating Die Film Thickness Adjustment

YiNGUAN can provide large-stroke, high-stiffness prestressed actuators for coating film thickness control of slot coating equipment, ensuring faster response and higher-precision coating film thickness.

New energy Smart Die Film

Piezoelectric Actuator Clamp

YiNGUAN can provide piezoelectric actuator clamps, which can be used in the wire bonding process of chip manufacturing.

wire bonding machine semiconductor

E-Beam Inspection (EBI) motion systems

Due to the various limitations of optical technology, electron beam imaging techniques have become indispensable as alternatives in advanced semiconductor processes.

Vacuum Electron beam Precision motion Quantity